EP 1759165 A1 20070307 - CALIBRATING DEVICE ON A SILICON SUBSTRATE
Title (en)
CALIBRATING DEVICE ON A SILICON SUBSTRATE
Title (de)
KALIBRIERVORRICHTUNG AUF EINEM SILIZIUMSUBSTRAT
Title (fr)
DISPOSITIF DE CALIBRATION SUR SUBSTRAT EN SILICIUM
Publication
Application
Priority
- FR 2005001582 W 20050623
- FR 0406912 A 20040624
Abstract (en)
[origin: WO2006010821A1] The invention relates to a calibrating device on a silicon substrate SU formed in addition to reference level Nc by at least two distinct levels Ng and Nd which have two distinct dopings. Said invention also relates to a method for producing the inventive calibrating device consisting in defining at least two distinct sections Sg and Sd of the reference section Sc on a silicon substrate SU and in doping with different degrees the different sections of the reference section.
IPC 8 full level
G01B 7/34 (2006.01); G01N 27/00 (2006.01); H01J 37/20 (2006.01); H01L 21/306 (2006.01); H01L 21/66 (2006.01); H01L 23/544 (2006.01)
CPC (source: EP US)
H01L 22/34 (2013.01 - EP US)
Citation (search report)
See references of WO 2006010821A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2872275 A1 20051230; FR 2872275 B1 20061013; EP 1759165 A1 20070307; US 2008016941 A1 20080124; WO 2006010821 A1 20060202
DOCDB simple family (application)
FR 0406912 A 20040624; EP 05783850 A 20050623; FR 2005001582 W 20050623; US 63030905 A 20050623