EP 1761942 A1 20070314 - DEVICE FOR COATING OPTICAL GLASS BY MEANS OF PLASMA-SUPPORTED CHEMICAL VAPOUR DEPOSITION (CVD)
Title (en)
DEVICE FOR COATING OPTICAL GLASS BY MEANS OF PLASMA-SUPPORTED CHEMICAL VAPOUR DEPOSITION (CVD)
Title (de)
VORRICHTUNG ZUM BESCHICHTEN OPTISCHER GLÄSER MITTELS PLASMAUNTERSTÜTZTER CHEMISCHER DAMPFABSCHEIDUNG (CVD)
Title (fr)
DISPOSITIF POUR ENDUIRE DES VERRES OPTIQUES PAR DEPOT CHIMIQUE EN PHASE VAPEUR (CVD) ASSISTE PAR PLASMA
Publication
Application
Priority
- EP 2005006245 W 20050610
- DE 102004030344 A 20040618
Abstract (en)
[origin: WO2005124820A1] The invention relates to a device (10) which is used to coat optical glass by means of plasma-supported chemical vapour deposition (CVD). A cylindrical reactor (12) is used in order to receive the glass which is to be coated. At least one microwave generator (24a, 24b) is provided in order to couple a microwave signal having a predetermined microwave frequency to the reactor (12). The at least one microwave generator (24a, 24b) comprises a microwave source (26a, 26b) which is coupled to the reactor (12) via a modem interference filter (30a, 30b).
IPC 8 full level
H01J 37/32 (2006.01); C03C 17/00 (2006.01); C23C 16/511 (2006.01)
CPC (source: EP)
C03C 17/002 (2013.01); C23C 16/511 (2013.01); H01J 37/32192 (2013.01); H01J 37/32284 (2013.01); H01J 2237/3321 (2013.01)
Citation (search report)
See references of WO 2005124820A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005124820 A1 20051229; DE 102004030344 A1 20060112; DE 102004030344 B4 20121206; EP 1761942 A1 20070314
DOCDB simple family (application)
EP 2005006245 W 20050610; DE 102004030344 A 20040618; EP 05756963 A 20050610