EP 1763658 A1 20070321 - MICROSTRUCTURED INFRA-RED SENSOR
Title (en)
MICROSTRUCTURED INFRA-RED SENSOR
Title (de)
MIKROSTRUKTURIERTER INFRAROT-SENSOR
Title (fr)
CAPTEUR A INFRAROUGE MICROSTRUCTURE
Publication
Application
Priority
- EP 2005052142 W 20050511
- DE 102004031315 A 20040629
Abstract (en)
[origin: WO2006000498A1] The invention relates to an infra-red sensor comprising at least one measuring structure (11) consisting of e.g. a sensor chip (10) with a measuring structure (11) and a cap chip (20), which is fixed onto the sensor chip (10) and together with the latter (10) defines a sensor chamber (23). An aperture (25, 32), comprising an inner aperture region (25b, 32b) and an outer aperture region (25a, 32a) that surrounds the latter (25b, 32b), is configured on the upper face (24) of the cap chip (20). The inner aperture region (25b, 32b) is configured above the measuring structure (11) and is transparent to the infra-red radiation (IR 1) that is to be detected and the outer aperture region (25a, 32a) is at least partially intransparent to incident infra-red radiation (IR2). The outer aperture region can be configured in particular as a reflective coating consisting of metal or a dielectric layer, or as a reflective structure composed of trenches with oblique surfaces or an absorbent structure.
IPC 8 full level
CPC (source: EP US)
G01J 5/0014 (2013.01 - EP US); G01J 5/02 (2013.01 - EP US); G01J 5/0225 (2013.01 - EP US); G01J 5/024 (2013.01 - EP US); G01J 5/06 (2013.01 - EP US); G01J 5/08 (2013.01 - EP US); G01J 5/0803 (2013.01 - EP US); G01J 5/0831 (2013.01 - EP US); G01J 5/0875 (2013.01 - EP US); G01J 5/12 (2013.01 - EP US); G01N 21/3504 (2013.01 - EP US); G01J 5/045 (2013.01 - EP US); G01N 2021/3137 (2013.01 - EP US); G01N 2021/317 (2013.01 - EP US)
Citation (search report)
See references of WO 2006000498A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102004031315 A1 20060119; EP 1763658 A1 20070321; JP 2008505331 A 20080221; US 2008061237 A1 20080313; WO 2006000498 A1 20060105
DOCDB simple family (application)
DE 102004031315 A 20040629; EP 05738156 A 20050511; EP 2005052142 W 20050511; JP 2007519747 A 20050511; US 63124905 A 20050511