EP 1766103 A2 20070328 - METHOD AND SYSTEM FOR SUPPLYING CARBON DIOXIDE
Title (en)
METHOD AND SYSTEM FOR SUPPLYING CARBON DIOXIDE
Title (de)
VERFAHREN UND VORRICHTUNG ZUR VERSORGUNG MIT KOHLENDIOXID
Title (fr)
PROCEDE ET SYSTEME D'ALIMENTATION EN DIOXYDE DE CARBONE
Publication
Application
Priority
- US 2005018814 W 20050531
- US 86269004 A 20040607
Abstract (en)
[origin: US2005268938A1] Provided is a novel method and system for supplying high-pressure carbon dioxide to an application having a variable carbon dioxide flow requirement. The method includes providing a high-pressure carbon dioxide feed stream to a buffer volume and determining the amount of carbon dioxide to be delivered to the application tool. The pressure in the buffer volume is maintained at a pressure that exceeds the pressure required by the application tool. The temperature in the buffer volume is further adjusted to modify the density of the carbon dioxide and based thereon the size of the buffer volume. Thereafter, the carbon dioxide from the buffer volume is delivered at a variable flow rate as required by the application tool.
IPC 8 full level
B08B 3/10 (2006.01); B01J 3/00 (2006.01); B08B 7/00 (2006.01); C01B 32/50 (2017.01); C23G 1/00 (2006.01); F17C 9/02 (2006.01); H01L 21/00 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP KR US)
B08B 3/10 (2013.01 - KR); B08B 5/02 (2013.01 - KR); B08B 7/0021 (2013.01 - EP US); F17C 9/02 (2013.01 - EP US); H01L 21/02101 (2013.01 - EP US); F17C 2205/0323 (2013.01 - EP US); F17C 2205/0338 (2013.01 - EP US); F17C 2205/0341 (2013.01 - EP US); F17C 2221/013 (2013.01 - EP US); F17C 2223/0153 (2013.01 - EP US); F17C 2223/0169 (2013.01 - EP US); F17C 2223/035 (2013.01 - EP US); F17C 2223/046 (2013.01 - EP US); F17C 2225/0123 (2013.01 - EP US); F17C 2225/036 (2013.01 - EP US); F17C 2227/0135 (2013.01 - EP US); F17C 2227/0306 (2013.01 - EP US); F17C 2227/0337 (2013.01 - EP US); F17C 2250/0626 (2013.01 - EP US); F17C 2250/0631 (2013.01 - EP US); F17C 2265/012 (2013.01 - EP US); F17C 2270/0518 (2013.01 - EP US)
Citation (search report)
See references of WO 2005121407A2
Designated contracting state (EPC)
DE FR GB IE IT
Designated extension state (EPC)
AL BA HR LV MK YU
DOCDB simple family (publication)
US 2005268938 A1 20051208; CN 101137451 A 20080305; EP 1766103 A2 20070328; JP 2008505297 A 20080221; KR 20070027689 A 20070309; TW 200610049 A 20060316; WO 2005121407 A2 20051222; WO 2005121407 A3 20070809
DOCDB simple family (application)
US 86269004 A 20040607; CN 200580018530 A 20050531; EP 05755008 A 20050531; JP 2007527581 A 20050531; KR 20077000334 A 20070105; TW 94118022 A 20050601; US 2005018814 W 20050531