EP 1766687 A1 20070328 - SOI VERTICAL BIPOLAR POWER COMPONENT
Title (en)
SOI VERTICAL BIPOLAR POWER COMPONENT
Title (de)
SOI VERTIKALES BIPOLARES LEISTUNGSBAUELEMENT
Title (fr)
COMPOSANT DE PUISSANCE BIPOLAIRE VERTICAL SOI
Publication
Application
Priority
- DE 2005001036 W 20050610
- DE 102004028474 A 20040611
Abstract (en)
[origin: WO2005122271A1] Disclosed is a vertical SOI component that is suitable for power applications. Said component comprises a vertical drift zone and an emitter structure which can be implemented with isolation trenches according to the silicon-on-insulator (SOI) technology. The aim of the invention is to reduce the area required for integrating power components (IGBT components and diode components) into circuits based on SOI disks. Said aim is achieved by an SOI component comprising an isolation trench (43) that defines a vertical drift zone (46), a buried insulating layer (42) to which the isolation trench extends, and an electrode region (31, 32) that emits charge carriers, is embodied adjacent to the insulating layer, and is in contact with the drift zone. Said electrode region is provided with first strip-shaped areas (31) that are doped in a first manner and second strip-shaped areas (32) that are doped in a second manner which is inverse to the first doping. The inventive SOI component further comprises a first sidewall doping (44) which is doped in the first manner and is disposed on a first sidewall of the isolation trench.
IPC 8 full level
H01L 29/06 (2006.01); H01L 29/739 (2006.01); H01L 29/861 (2006.01)
CPC (source: EP US)
H01L 29/0696 (2013.01 - EP US); H01L 29/7394 (2013.01 - EP US); H01L 29/7398 (2013.01 - EP US); H01L 29/861 (2013.01 - EP US)
Citation (search report)
See references of WO 2005122271A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005122271 A1 20051222; CN 101002329 A 20070718; DE 102004028474 A1 20060105; DE 102004028474 B4 20090409; EP 1766687 A1 20070328; US 2008290366 A1 20081127; US 7989921 B2 20110802
DOCDB simple family (application)
DE 2005001036 W 20050610; CN 200580026898 A 20050610; DE 102004028474 A 20040611; EP 05759586 A 20050610; US 62902205 A 20050610