EP 1771600 A2 20070411 - VACUUM-COATING INSTALLATION AND METHOD
Title (en)
VACUUM-COATING INSTALLATION AND METHOD
Title (de)
VAKUUMBESCHICHTUNGSANLAGE UND VERFAHREN ZUR VAKUUMBESCHICHTUNG
Title (fr)
INSTALLATION DE REVETEMENT SOUS VIDE ET PROCEDE DE REVETEMENT SOUS VIDE
Publication
Application
Priority
- EP 2005007418 W 20050708
- DE 102004036170 A 20040726
Abstract (en)
[origin: WO2006010451A2] The invention relates to an installation for vacuum-coating substrates, said installation comprising a vacuum chamber, a system for holding at least one substrate, and a transport device for transporting the substrate into the coating regions, at least one first coating region of the vacuum chamber being provided with at least one device for plasma impulse chemical vapour deposition (PICVD) and at least one second coating region of the vacuum chamber being provided with at least one device for sputter coating.
IPC 8 full level
C23C 16/515 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01)
CPC (source: EP US)
C23C 14/34 (2013.01 - EP US); C23C 16/515 (2013.01 - EP US)
Citation (search report)
See references of WO 2006010451A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006010451 A2 20060202; WO 2006010451 A3 20060420; DE 102004036170 A1 20060323; DE 102004036170 B4 20071011; EP 1771600 A2 20070411; JP 2008507629 A 20080313; JP 5224810 B2 20130703; US 2008210550 A1 20080904
DOCDB simple family (application)
EP 2005007418 W 20050708; DE 102004036170 A 20040726; EP 05773105 A 20050708; JP 2007522952 A 20050708; US 57225505 A 20050708