EP 1774576 A1 20070418 - INTEGRATED CIRCUIT COMPRISING A CAPACITOR WITH METAL ELECTRODES, AND METHOD OF PRODUCING ONE SUCH CAPACITOR
Title (en)
INTEGRATED CIRCUIT COMPRISING A CAPACITOR WITH METAL ELECTRODES, AND METHOD OF PRODUCING ONE SUCH CAPACITOR
Title (de)
INTEGRIERTE SCHALTUNG MIT KONDENSATOR MIT METALLELEKTRODEN UND VERFAHREN ZUR HERSTELLUNG EINES DERARTIGEN KONDENSATORS
Title (fr)
CIRCUIT INTEGRE COMPRENANT UN CONDENSATEUR A ELECTRODES METALLIQUES ET PROCEDE DE FABRICATION D'UN TEL CONDENSATEUR
Publication
Application
Priority
- FR 2005001400 W 20050607
- FR 0406674 A 20040618
Abstract (en)
[origin: WO2006008356A1] The invention relates to an integrated circuit (IC) comprising at least one capacitor with metal electrodes, whereby at least one of said electrodes (10 or 30) is made from silicon or a silicon alloy having hemispherical grains and being silicided at least on the surface thereof. The invention also relates to a production method which can be used to obtain one such capacitor with silicided metal electrodes.
IPC 8 full level
H10N 97/00 (2023.01); H01L 21/02 (2006.01); H01L 29/92 (2006.01)
CPC (source: EP US)
H01L 28/84 (2013.01 - EP US); H01L 28/90 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
FR 2871935 A1 20051223; CN 1957442 A 20070502; EP 1774576 A1 20070418; JP 2008503077 A 20080131; US 2008185681 A1 20080807; US 2010320567 A1 20101223; US 7781296 B2 20100824; US 8975682 B2 20150310; WO 2006008356 A1 20060126
DOCDB simple family (application)
FR 0406674 A 20040618; CN 200580016703 A 20050607; EP 05775544 A 20050607; FR 2005001400 W 20050607; JP 2007515985 A 20050607; US 57073105 A 20050607; US 86125610 A 20100823