EP 1775633 A4 20100728 - COMPOSITION FOR ANTIREFLECTION COATING AND METHOD FOR FORMING PATTERN USING SAME
Title (en)
COMPOSITION FOR ANTIREFLECTION COATING AND METHOD FOR FORMING PATTERN USING SAME
Title (de)
ZUSAMMENSETZUNG FÜR EINE ANTIREFLEXBESCHICHTUNG UND VERFAHREN ZUR BILDUNG EINER STRUKTUR DAMIT
Title (fr)
COMPOSITION POUR REVÊTEMENT ANTIREFLET ET PROCÉDÉ SERVANT À FORMER UNE IMPRESSION UTILISANT CELLE-CI
Publication
Application
Priority
- JP 2005012001 W 20050629
- JP 2004194423 A 20040630
Abstract (en)
[origin: EP1775633A1] The object of the present invention is to provide an anti-reflective coating composition having excellent coating properties while maintaining performance as an anti-reflective film. An anti-reflective coating composition comprising at least the following components (A), (B), (C), (D), and (E) and a production method for a pattern using the anti-reflective coating composition, (A) perfluoroalkyl · alkylenesulfonic acid represented by the following formula (1): C n F 2n+1 (CH 2 CH 2 ) m SO 3 H (1) (wherein, n represents an integer from 1 to 20, and m represents an integer from 0 to 20); (B) organic amine; (C) water-soluble polymer; (D) perfluoroalkylethyl group containing compound represented by the following formula (2): C k F 2k+1 CH 2 CH 2 -X-Y (2) (wherein, k represents an integer from 1 to 20, x represents a single bond or a divalent linking group, y represents an anionic group or a nonionic group, and this compound has a structure different from that of the component (A)); and (E) water.
IPC 8 full level
G03F 7/11 (2006.01); G03F 7/004 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR US)
G03F 7/0046 (2013.01 - KR); G03F 7/0048 (2013.01 - EP KR US); G03F 7/091 (2013.01 - EP KR US); G03F 7/11 (2013.01 - KR); H01L 21/0276 (2013.01 - KR); G03F 7/0046 (2013.01 - EP US); G03F 7/11 (2013.01 - EP US); Y10S 438/952 (2013.01 - EP KR US)
Citation (search report)
- [Y] JP H103001 A 19980106 - DAINIPPON INK & CHEMICALS
- [Y] EP 1026208 A1 20000809 - CLARIANT INT LTD [CH], et al
- See references of WO 2006003958A1
Designated contracting state (EPC)
DE
DOCDB simple family (publication)
EP 1775633 A1 20070418; EP 1775633 A4 20100728; CN 100587600 C 20100203; CN 101031846 A 20070905; JP 4397931 B2 20100113; JP WO2006003958 A1 20080731; KR 101156656 B1 20120615; KR 20070032954 A 20070323; TW 200615697 A 20060516; TW I362566 B 20120421; US 2007238048 A1 20071011; US 7537882 B2 20090526; WO 2006003958 A1 20060112
DOCDB simple family (application)
EP 05765177 A 20050629; CN 200580021579 A 20050629; JP 2005012001 W 20050629; JP 2006528769 A 20050629; KR 20067026871 A 20050629; TW 94121404 A 20050627; US 63041105 A 20050629