EP 1778582 A1 20070502 - MICROMECHANICAL COMPONENT WITH A NUMBER OF CHAMBERS AND PRODUCTION METHOD
Title (en)
MICROMECHANICAL COMPONENT WITH A NUMBER OF CHAMBERS AND PRODUCTION METHOD
Title (de)
MIKROMECHANISCHES BAUELEMENT MIT MEHREREN KAMMERN UND HERSTELLUNGSVERFAHREN
Title (fr)
COMPOSANT MICROMECANIQUE PRESENTANT PLUSIEURS CHAMBRES ET PROCEDE DE FABRICATION
Publication
Application
Priority
- EP 2005051917 W 20050428
- DE 102004027501 A 20040604
Abstract (en)
[origin: WO2005118463A1] The invention relates to a micromechanical component having at least two caverns, in which the caverns are delimited by a micromechanical part and by a cap, and the caverns have different atmospheric internal pressures. The invention also relates to a method for producing a micromechanical component having at least two caverns, in which the caverns are delimited by a micromechanical part and by cap. To this end, the micromechanical part and the cap are hermetically joined to one another at a first predeterminable atmospheric pressure. Afterwards, an entrance to at least one cavern is made, and the entrance is then hermetically closed at a second predeterminable atmospheric pressure.
IPC 8 full level
B81B 7/02 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01)
CPC (source: EP US)
B81B 7/0041 (2013.01 - EP US); B81B 7/02 (2013.01 - EP US); B81B 2201/025 (2013.01 - EP US); B81C 2201/019 (2013.01 - EP US); B81C 2203/0145 (2013.01 - EP US)
Citation (search report)
See references of WO 2005118463A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 2005118463 A1 20051215; DE 102004027501 A1 20051222; EP 1778582 A1 20070502; JP 2008501535 A 20080124; US 2008136000 A1 20080612; US 8174082 B2 20120508
DOCDB simple family (application)
EP 2005051917 W 20050428; DE 102004027501 A 20040604; EP 05740037 A 20050428; JP 2007513899 A 20050428; US 62810005 A 20050428