EP 1778889 A1 20070502 - COATING SYSTEM ADAPTED TO A CLEAN ROOM
Title (en)
COATING SYSTEM ADAPTED TO A CLEAN ROOM
Title (de)
REINRAUMFÄHIGE BESCHICHTUNGSANLAGE
Title (fr)
INSTALLATION DE REVETEMENT ADAPTEE A UNE SALLE BLANCHE
Publication
Application
Priority
- EP 2005007652 W 20050714
- DE 102004035335 A 20040721
Abstract (en)
[origin: WO2006008060A1] The invention relates to a coating system comprising a vacuum chamber wherein, glass-like, vitroceramic and/or ceramic layers are applied to substrates by deposition in the gas phase. At least one protection device is arranged in said vacuum chamber, said protection device protecting the vacuum chamber walls and/or the components arranged in the chamber from undesired deposits of the layer starting material. It is essential that expansion and/or shrinking of the protection device corresponds to the expansion and/or shrinking of the glass-like, vitroceramic or ceramic layer and/or deposits in case of temperature modifications in the vacuum chamber.
IPC 8 full level
C23C 14/56 (2006.01)
CPC (source: EP US)
C23C 14/564 (2013.01 - EP US); H01J 37/32477 (2013.01 - EP US)
Citation (search report)
See references of WO 2006008060A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102004035335 A1 20060216; EP 1778889 A1 20070502; JP 2008506848 A 20080306; TW 200624597 A 20060716; US 2008053373 A1 20080306; WO 2006008060 A1 20060126
DOCDB simple family (application)
DE 102004035335 A 20040721; EP 05759851 A 20050714; EP 2005007652 W 20050714; JP 2007521860 A 20050714; TW 94124512 A 20050720; US 57225205 A 20050714