EP 1780766 A1 20070502 - Magnetron sputtering system for large-area substrates having removable anodes
Title (en)
Magnetron sputtering system for large-area substrates having removable anodes
Title (de)
Magnetron Zerstäubungssystem für grossflächige Substrate mit abnehmbaren Anoden
Title (fr)
Système de pulvérisation magnétron pour substrats de grande surface ayant des anodes amovibles
Publication
Application
Priority
- EP 05027887 A 20051220
- US 69942805 P 20050713
- US 24743805 A 20051011
- US 24770505 A 20051011
Abstract (en)
The present invention generally provides an apparatus and method for processing a surface of a substrate in physical vapor deposition (PVD) chamber that has an increased anode surface area to improve the deposition uniformity on large area substrates. In general, aspects of the present invention can be used for flat panel display processing, semiconductor processing, solar cell processing, or any other substrate processing. In one aspect, the processing chamber contains one or more anode assemblies that are used to increase and more evenly distribute the anode surface area throughout the processing region of the processing chamber. In one aspect, the anode assembly contains a conductive member and conductive member support. In one aspect, the processing chamber is adapted to allow the conductive member to be removed from the processing chamber without removing any major components from the processing chamber.
IPC 8 full level
H01J 37/34 (2006.01)
CPC (source: EP)
H01J 37/32697 (2013.01); H01J 37/3408 (2013.01); H01J 37/3438 (2013.01); H01J 37/3447 (2013.01)
Citation (search report)
- [X] US 6692617 B1 20040217 - FU JIANMING [US], et al
- [X] EP 0858095 A2 19980812 - INTEVAC INC [US]
- [X] WO 03008659 A2 20030130 - APPLIED MATERIALS INC [US]
- [XA] US 5630917 A 19970520 - GUO XIN S [US]
- [X] JP H07331433 A 19951219 - HITACHI LTD
- [A] JP H06108244 A 19940419 - KYUSHU NIPPON ELECTRIC
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
DOCDB simple family (application)
EP 07001496 A 20051220