EP 1782510 A2 20070509 - FIBER AMPLIFIED BASED LIGHT SOURCE FOR SEMICONDUCTOR INSPECTION
Title (en)
FIBER AMPLIFIED BASED LIGHT SOURCE FOR SEMICONDUCTOR INSPECTION
Title (de)
AUF FASERVERSTÄRKUNG BASIERTE LICHTQUELLE ZUR PRÜFUNG VON HALBLEITERN
Title (fr)
SOURCE DE LUMIERE A BASE D'UN AMPLIFICATEUR DE FIBRE SERVANT A CONTROLER DES SEMI-CONDUCTEURS
Publication
Application
Priority
- US 2005028993 W 20050816
- US 60454004 P 20040825
- US 5685505 A 20050211
Abstract (en)
[origin: WO2006023448A2] A laser illuminator for use in an inspection system, such as a semiconductor wafer inspection system or photomask inspection system is provided. The gain medium in the illuminator comprises optical fiber, and amplification, beam splitting, frequency and/or bandwidth conversion, peak power reduction, and q-switching or mode locking may be employed. Certain constructs including doped fiber, gratings, saturable absorbers, and laser diodes are disclosed to provide enhanced illumination.
IPC 8 full level
G01N 21/95 (2006.01); H01S 3/03 (2006.01)
CPC (source: EP)
G01N 21/8806 (2013.01); H01S 3/06708 (2013.01); H01S 3/06754 (2013.01); H01S 3/2383 (2013.01); G01N 21/9501 (2013.01); G02B 6/02347 (2013.01); G02B 6/02366 (2013.01); H01S 3/005 (2013.01); H01S 3/0057 (2013.01); H01S 3/06729 (2013.01); H01S 3/06741 (2013.01); H01S 3/06745 (2013.01); H01S 3/06791 (2013.01); H01S 3/094007 (2013.01); H01S 3/094019 (2013.01); H01S 3/09415 (2013.01); H01S 3/1118 (2013.01)
Designated contracting state (EPC)
DE FR GB
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
WO 2006023448 A2 20060302; WO 2006023448 A3 20061019; EP 1782510 A2 20070509; EP 1782510 A4 20100407; EP 2369695 A2 20110928; EP 2369695 A3 20120208; EP 2369695 B1 20131113; JP 2008511177 A 20080410; JP 5255838 B2 20130807
DOCDB simple family (application)
US 2005028993 W 20050816; EP 05813080 A 20050816; EP 11001760 A 20050816; JP 2007529941 A 20050816