EP 1786948 A1 20070523 - COATING SYSTEM ADAPTED TO A CLEAN ROOM
Title (en)
COATING SYSTEM ADAPTED TO A CLEAN ROOM
Title (de)
REINRAUMFÄHIGE BESCHICHTUNGSANLAGE
Title (fr)
INSTALLATION DE REVETEMENT ADAPTEE AUX SALLES BLANCHES
Publication
Application
Priority
- EP 2005007653 W 20050714
- DE 102004035336 A 20040721
Abstract (en)
[origin: WO2006008061A1] The invention relates to a coating system for PVD or CVD processes, which is adapted to a clean room. Said system comprises at least one vacuum coating chamber, wherein glass-like, vitroceramic and/or ceramic layers are deposited. A first opening of the vacuum coating chamber is joined to a clean room via a separate, vacuum-lock chamber (load-lock) which can be evacuated. The vacuum lock chamber comprises transport means which are used to feed substrates into the vacuum coating chamber and to remove substrates from the vacuum coating chamber. A second opening of the vacuum-coating chamber joins the vacuum-coating chamber to a grey room area which is separated from the clean room.
IPC 8 full level
C23C 14/10 (2006.01); C23C 14/58 (2006.01)
CPC (source: EP US)
C23C 14/566 (2013.01 - EP US); C23C 16/4404 (2013.01 - EP US)
Citation (search report)
See references of WO 2006008061A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102004035336 A1 20060216; EP 1786948 A1 20070523; JP 2008506849 A 20080306; TW 200609379 A 20060316; US 2007251458 A1 20071101; WO 2006008061 A1 20060126
DOCDB simple family (application)
DE 102004035336 A 20040721; EP 05759758 A 20050714; EP 2005007653 W 20050714; JP 2007521861 A 20050714; TW 94124517 A 20050720; US 57225405 A 20050714