EP 1789752 A2 20070530 - THIN FILM INTERFERENCE FILTER AND BOOTSTRAP METHOD FOR INTERFERENCE FILTER THIN FILM DEPOSITION PROCESS CONTROL
Title (en)
THIN FILM INTERFERENCE FILTER AND BOOTSTRAP METHOD FOR INTERFERENCE FILTER THIN FILM DEPOSITION PROCESS CONTROL
Title (de)
DÜNNFILMINTERFERENZFILTER UND BOOTSTRAP-VERFAHREN FÜR INTERFERENZFILTERDÜNNFILMABLAGEPROZESSSTEUERUNG
Title (fr)
FILTRE INTERFERENTIEL A COUCHE MINCE ET PROCEDE BOOTSTRAP DE CONTROLE DU PROCESSUS DE DEPOT EN COUCHE MINCE DE FILTRE INTERFERENTIEL
Publication
Application
Priority
- US 2005032420 W 20050913
- US 60940604 P 20040913
Abstract (en)
[origin: WO2006031733A2] A thin film interference filter system includes a plurality of stacked films having a determined reflectance; a modeled monitor curve; and a topmost layer configured to exhibit a wavelength corresponding to one of the determined reflectance or the modeled monitor curve. The topmost layer is placed on the plurality of stacked films and can be a low-index film such as silica or a high index film such as niobia.
IPC 8 full level
G01B 11/02 (2006.01); G01B 11/06 (2006.01)
CPC (source: EP)
G01B 11/0625 (2013.01); G01B 11/0683 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
WO 2006031733 A2 20060323; WO 2006031733 A3 20070222; EP 1789752 A2 20070530; EP 1789752 A4 20091104; JP 2008512730 A 20080424
DOCDB simple family (application)
US 2005032420 W 20050913; EP 05816196 A 20050913; JP 2007531424 A 20050913