EP 1791987 A2 20070606 - METHOD FOR VACUUM-COATING WITH A PHOTO-SEMICONDUCTING LAYER AND USE OF SAID METHOD
Title (en)
METHOD FOR VACUUM-COATING WITH A PHOTO-SEMICONDUCTING LAYER AND USE OF SAID METHOD
Title (de)
VERFAHREN ZUM VAKUUMBESCHICHTEN MIT EINER PHOTOHALBLEITENDEN SCHICHT UND ANWENDUNG DES VERFAHRENS
Title (fr)
PROCEDE POUR REVETIR SOUS VIDE AU MOYEN D'UNE COUCHE PHOTO-SEMI-CONDUCTRICE, ET APPLICATIONS DU PROCEDE
Publication
Application
Priority
- EP 2005006238 W 20050610
- DE 102004046390 A 20040924
Abstract (en)
[origin: WO2006034739A2] The invention relates to a method for vacuum-coating an object with a photo-semiconducting layer. Said method is characterized by the following steps: adjusting the temperature of the surface-near area of the object to a value in the range of from -40 °C to +250 °C prior to coating; operating a reactive pulsed magnetron sputter process with at least one electrically conducting target containing titanium as the main component in a working gas containing at least one inert gas and oxygen; controlling the process in accordance with the purpose of application of the coated object in such a manner as to ensure formation of mainly titanium oxide in a defined ratio of the atomic composition of the layer of titanium to oxygen such as 1: (2+x), whereby x ranges from -0.5 to +0.3; adjusting such a ratio of the rates of ionized and neutral particles during layer formation that a portion of at least 5 percent of titanium oxide is formed as a crystalline modification thereof and that the parameters of the sputter process are selected in such a manner that the surface temperature of the object does not exceed a maximum temperature of 300 °C.
IPC 8 full level
C23C 14/35 (2006.01); C23C 14/54 (2006.01)
CPC (source: EP)
C23C 14/0042 (2013.01); C23C 14/083 (2013.01)
Citation (search report)
See references of WO 2006034739A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102004046390 A1 20060406; EP 1791987 A2 20070606; WO 2006034739 A2 20060406; WO 2006034739 A3 20060608
DOCDB simple family (application)
DE 102004046390 A 20040924; EP 05761661 A 20050610; EP 2005006238 W 20050610