EP 1793416 B1 20170510 - Capacitor and method for manufacturing the same
Title (en)
Capacitor and method for manufacturing the same
Title (de)
Kondensator und dessen Herstellungsverfahren
Title (fr)
Condensateur et procédé de fabrication correspondant
Publication
Application
Priority
JP 2005346136 A 20051130
Abstract (en)
[origin: EP1793416A2] A method for manufacturing a capacitor including the steps of: preparing a lower electrode; forming a dielectric on the lower electrode to fabricate a first laminated structure; annealing the first laminated structure; forming an upper electrode on a dielectric film to fabricate a second laminated structure; and annealing the second laminated structure under a reduced pressure atmosphere at a temperature of 150°C or higher.
IPC 8 full level
H01G 4/33 (2006.01); H10B 12/00 (2023.01); H01G 4/008 (2006.01); H01G 4/12 (2006.01); H01G 4/232 (2006.01); H01L 49/02 (2006.01)
CPC (source: EP KR US)
H01G 4/008 (2013.01 - EP US); H01G 4/33 (2013.01 - EP US); H01L 27/04 (2013.01 - KR); H01L 28/55 (2013.01 - EP US); H10B 12/00 (2023.02 - KR); H10B 99/00 (2023.02 - KR); Y10T 29/435 (2015.01 - EP US); Y10T 29/49128 (2015.01 - EP US)
Citation (examination)
G. TEOWEE ET AL: "Effect of post-metallization annealing on the ferroelectric properties of sol-gel derived PZT thin films", JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, vol. 2, no. 1-3, 1 January 1994 (1994-01-01), pages 623 - 626, XP055137433, ISSN: 0928-0707, DOI: 10.1007/BF00486322
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1793416 A2 20070606; EP 1793416 A3 20090930; EP 1793416 B1 20170510; CN 1975945 A 20070606; CN 1975945 B 20120411; EP 2772954 A2 20140903; EP 2772954 A3 20140910; JP 2007150207 A 20070614; JP 4670612 B2 20110413; KR 101248792 B1 20130403; KR 20070056970 A 20070604; TW 200737244 A 20071001; US 2007236866 A1 20071011; US 7581311 B2 20090901
DOCDB simple family (application)
EP 06024540 A 20061127; CN 200610163302 A 20061130; EP 14001474 A 20061127; JP 2005346136 A 20051130; KR 20060117538 A 20061127; TW 95143967 A 20061128; US 60298106 A 20061122