EP 1794600 B1 20150408 - PROBE FOR MEASURING CHARACTERISTICS OF AN EXCITATION CURRENT OF A PLASMA, AND ASSOCIATED PLASMA REACTOR
Title (en)
PROBE FOR MEASURING CHARACTERISTICS OF AN EXCITATION CURRENT OF A PLASMA, AND ASSOCIATED PLASMA REACTOR
Title (de)
SONDE ZUR MESSUNG VON EIGENSCHAFTEN EINES ERREGUNGSSTROMS EINES PLASMAS UND ASSOZIIERTER PLASMAREAKTOR
Title (fr)
SONDE DE MESURE DE CARACTERISTIQUES D'UN COURANT D'EXCITATION D'UN PLASMA, ET REACTEUR A PLASMA ASSOCIE.
Publication
Application
Priority
- EP 2005054599 W 20050915
- FR 0409811 A 20040916
Abstract (en)
[origin: WO2006030024A1] The invention relates to a probe for measuring electrical characteristics of an excitation current of a plasma, said probe being mounted on a conductive line (20) that comprises an inner conductor (21) and an outer conductor (22), comprising a current sensor (41) and a voltage sensor (42), characterized in that: the current sensor comprises: a groove (410) formed in the ground of one of the conductors (22) in order to form a detour for the current flowing through said conductor, and a point for measuring electric voltage between a ground connected to said conductor and a point of the groove, said current sensor thereby being able to measure a voltage (V1) proportional to the first time derivative of intensity (I<sub
IPC 8 full level
G01R 19/00 (2006.01); H05H 1/00 (2006.01)
CPC (source: EP US)
H05H 1/0081 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2875304 A1 20060317; FR 2875304 B1 20061222; EP 1794600 A1 20070613; EP 1794600 B1 20150408; JP 2008513940 A 20080501; JP 5209313 B2 20130612; US 2007252580 A1 20071101; US 7615985 B2 20091110; WO 2006030024 A1 20060323
DOCDB simple family (application)
FR 0409811 A 20040916; EP 05789496 A 20050915; EP 2005054599 W 20050915; JP 2007531750 A 20050915; US 66312905 A 20050915