EP 1797489 A4 20080730 - METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER
Title (en)
METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER
Title (de)
VERFAHREN UND SYSTEM ZUR STRÖMUNGSMESSUNG UND VALIDIERUNG EINER MASSENSTRÖMUNGSSTEUERUNG
Title (fr)
PROCÉDÉ ET SYSTÈME DE MESURE D'ÉCOULEMENT ET VALIDATION D'UNE UNITÉ DE COMMANDE D'ÉCOULEMENT MASSIVE
Publication
Application
Priority
- US 2005024084 W 20050707
- US 88759104 A 20040709
- US 94603104 A 20040921
Abstract (en)
[origin: WO2006017116A2] Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.
IPC 8 full level
G05D 7/06 (2006.01)
CPC (source: EP)
G01F 25/15 (2022.01); G01F 25/17 (2022.01); G05D 7/0635 (2013.01)
Citation (search report)
- [AX] WO 0233361 A2 20020425 - MKS INSTR INC [US]
- [A] US 5684245 A 19971104 - HINKLE LUKE D [US]
- See references of WO 2006017116A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006017116 A2 20060216; WO 2006017116 A3 20070301; EP 1797489 A2 20070620; EP 1797489 A4 20080730; JP 2008506116 A 20080228; TW 200613700 A 20060501; TW I278606 B 20070411
DOCDB simple family (application)
US 2005024084 W 20050707; EP 05772286 A 20050707; JP 2007520494 A 20050707; TW 94123260 A 20050708