EP 1800797 A4 20110126 - POLISHING APPARATUS AND POLISHING METHOD
Title (en)
POLISHING APPARATUS AND POLISHING METHOD
Title (de)
POLIERVORRICHTUNG UND POLIERVERFAHREN
Title (fr)
APPAREIL ET PROCÉDÉ DE POLISSAGE
Publication
Application
Priority
- JP 2005016045 W 20050901
- JP 2004291950 A 20040903
Abstract (en)
[origin: WO2006025507A1] A polishing apparatus and a polishing method. The polishing apparatus capable of accurately chamfering the end face parts of a large-sized substrate is installed on a table unit in which the substrate is placed. The substrate is fixedly held on the table unit (60) under a specified reference condition. A first polishing unit (40a) comprises a polishing grinding wheel polishing the end faces of the substrate held on the table unit (60) and a substrate side edge part support means supporting the side edge part lower surface of the substrate near the end faces of the substrate polished by the polishing grinding wheel. The first polishing unit (40a) is moved by a first polishing unit moving means (85A) along the end faces of the substrate together with the substrate side edge part support means under the condition that the polishing grinding wheel polishes the end faces of the substrate.
IPC 8 full level
B24B 9/10 (2006.01); B24B 9/00 (2006.01); B24B 41/06 (2012.01); B24B 49/12 (2006.01)
CPC (source: EP KR US)
B24B 9/065 (2013.01 - EP US); B24B 9/10 (2013.01 - KR); B24B 41/00 (2013.01 - KR); B24B 41/06 (2013.01 - EP US); B24B 49/12 (2013.01 - KR)
Citation (search report)
- No further relevant documents disclosed
- See references of WO 2006025507A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1800797 A1 20070627; EP 1800797 A4 20110126; CN 101005921 A 20070725; CN 101005921 B 20101027; JP 4920416 B2 20120418; JP WO2006025507 A1 20080508; KR 101213017 B1 20121217; KR 20070046886 A 20070503; TW 200618936 A 20060616; TW I394638 B 20130501; US 2009029627 A1 20090129; WO 2006025507 A1 20060309
DOCDB simple family (application)
EP 05781363 A 20050901; CN 200580027515 A 20050901; JP 2005016045 W 20050901; JP 2006531991 A 20050901; KR 20077004421 A 20050901; TW 94130079 A 20050902; US 57463905 A 20050901