Global Patent Index - EP 1805420 A1

EP 1805420 A1 20070711 - MOTIVATING FLUID VACUUM PUMP

Title (en)

MOTIVATING FLUID VACUUM PUMP

Title (de)

TREIBMITTEL-VAKUUMPUMPE

Title (fr)

POMPE A FLUIDE MOTEUR

Publication

EP 1805420 A1 20070711 (DE)

Application

EP 05803340 A 20051031

Priority

  • EP 2005011660 W 20051031
  • DE 102004053006 A 20041029

Abstract (en)

[origin: WO2006045634A1] The invention relates to a motivating fluid vacuum pump used in microsystems technology, comprising an evaporator chamber and a pump chamber that are separated by a nozzle arrangement. The design of the motivating fluid vacuum pump is improved by: a planar arrangement of at least one nozzle, which vertically extends into the depth and which is situated between two, in particular, parallel plates, these plates closing the evaporator chamber and the pump chamber; an opening in the pump chamber, preferably above the nozzle arrangement, for drawing in a medium to be pumped, and; an opening for expulsing a preferably compressed gas underneath the nozzle arrangement.

IPC 8 full level

F04F 9/00 (2006.01); F04F 5/20 (2006.01); F04F 5/46 (2006.01)

CPC (source: EP)

F04B 19/006 (2013.01); F04F 5/20 (2013.01); F04F 5/46 (2013.01); F04F 9/00 (2013.01)

Citation (search report)

See references of WO 2006045634A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

DE 102004053006 A1 20060504; AT 473374 T 20100715; DE 502005009877 D1 20100819; EP 1805420 A1 20070711; EP 1805420 B1 20100707; US 2008075613 A1 20080327; WO 2006045634 A1 20060504

DOCDB simple family (application)

DE 102004053006 A 20041029; AT 05803340 T 20051031; DE 502005009877 T 20051031; EP 05803340 A 20051031; EP 2005011660 W 20051031; US 79650507 A 20070427