EP 1805420 A1 20070711 - MOTIVATING FLUID VACUUM PUMP
Title (en)
MOTIVATING FLUID VACUUM PUMP
Title (de)
TREIBMITTEL-VAKUUMPUMPE
Title (fr)
POMPE A FLUIDE MOTEUR
Publication
Application
Priority
- EP 2005011660 W 20051031
- DE 102004053006 A 20041029
Abstract (en)
[origin: US2008075613A1] The invention relates to a driving agent vacuum pump used in microsystems technology, comprising an evaporator chamber and a pump chamber that are separated by a jet arrangement. The design of the driving agent vacuum pump is improved by: a planar arrangement of at least one jet, which extends vertically in depth and which is situated between two, in particular, parallel plates, these plates closing the evaporator chamber and the pump chamber; an opening in the pump chamber, preferably above the jet arrangement, for drawing in a medium to be pumped, and; an opening for expelling a preferably compressed gas underneath the jet arrangement.
IPC 8 full level
F04F 9/00 (2006.01); F04F 5/20 (2006.01); F04F 5/46 (2006.01)
CPC (source: EP US)
F04B 19/006 (2013.01 - EP US); F04F 5/20 (2013.01 - EP US); F04F 5/46 (2013.01 - EP US); F04F 9/00 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2008075613 A1 20080327; AT E473374 T1 20100715; DE 102004053006 A1 20060504; DE 502005009877 D1 20100819; EP 1805420 A1 20070711; EP 1805420 B1 20100707; WO 2006045634 A1 20060504
DOCDB simple family (application)
US 79650507 A 20070427; AT 05803340 T 20051031; DE 102004053006 A 20041029; DE 502005009877 T 20051031; EP 05803340 A 20051031; EP 2005011660 W 20051031