EP 1807547 A1 20070718 - AN ELONGATED GAS DITRIBUTION SYSTEM
Title (en)
AN ELONGATED GAS DITRIBUTION SYSTEM
Title (de)
LANGGESTRECKTES GASVERTEILUNGSSYSTEM
Title (fr)
SYSTEME DE DISTRIBUTION DE GAZ ALLONGE
Publication
Application
Priority
- EP 2005054986 W 20051004
- EP 04104976 A 20041011
- EP 05801451 A 20051004
Abstract (en)
[origin: WO2006040275A1] An elongated gas distribution system is described for use in a plasma deposition or plasma cleaning apparatus. The system is provided in the form of a stack of elongated strips. The strips have grooves milled in them that form channels once the strips are stacked upon each other. Such an arrangement is particularly design flexible and allows for a finely branched gas distribution tree. The incorporation of gas flow controlling means such as valves or vanes inside or on the gas distribution system becomes also possible. By actuating these gas flow controlling means based on the input of a plasma, deposited layer or cleaned substrate feedback parameter, a fast responding gas distribution system is realised. In addition, some of the strips can be used to incorporate a cooling circuit for cooling the elongated gas distribution system.
IPC 8 full level
C23C 16/455 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP)
B08B 7/0035 (2013.01); C23C 14/0063 (2013.01)
Citation (search report)
See references of WO 2006040275A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006040275 A1 20060420; CN 101040061 A 20070919; CN 101040061 B 20110706; EP 1807547 A1 20070718; JP 2008516084 A 20080515; JP 5046334 B2 20121010
DOCDB simple family (application)
EP 2005054986 W 20051004; CN 200580034637 A 20051004; EP 05801451 A 20051004; JP 2007535153 A 20051004