EP 1807730 A1 20070718 - APPARATUS AND METHOD FOR INSPECTING EDGE DEFECT AND DISCOLORATION OF GLASS SUBSTRATE
Title (en)
APPARATUS AND METHOD FOR INSPECTING EDGE DEFECT AND DISCOLORATION OF GLASS SUBSTRATE
Title (de)
VORRICHTUNG UND VERFAHREN ZUR RANDDEFEKTEINSPEKTION UND ENTFÄRBUNG VON EINEM GLASSUBTRAT
Title (fr)
APPAREIL ET PROCEDE POUR INSPECTER UN DEFAUT DE BORD ET LA DECOLORATION D'UN SUBSTRAT DE VERRE
Publication
Application
Priority
- KR 2006000678 W 20060227
- KR 20050017428 A 20050302
Abstract (en)
[origin: WO2006093381A1] Provided are an apparatus and method for inspecting an edge defect and discoloration. The apparatus includes a loading unit for conveying a glass substrate used to manufacture a thin film transistor liquid crystal display; an inspection unit for inspecting edge defects and discoloration of the glass substrate conveyed by the loading unit; and a control unit for controlling the loading unit and the inspection unit. The edge defect and discoloration inspection apparatus is capable of automatically performing edge defect and discoloration inspection of a glass substrate during processes of manufacturing a thin film transistor liquid crystal display. In addition, it is possible to dispose the edge defect and discoloration inspection apparatus between deposition, etching and sputtering processes to confirm whether the glass substrate is good or bad in real time, thereby performing an economic and rapid process.
IPC 8 full level
G02F 1/13 (2006.01)
CPC (source: EP KR)
A47J 31/54 (2013.01 - KR); G01N 21/27 (2013.01 - EP); G01N 21/896 (2013.01 - EP); G02F 1/1309 (2013.01 - EP); A47J 31/441 (2013.01 - KR); A47J 31/46 (2013.01 - KR); A47J 36/14 (2013.01 - KR); A47J 36/38 (2013.01 - KR); G01N 2021/9513 (2013.01 - EP); G02F 1/133302 (2021.01 - EP)
Citation (search report)
See references of WO 2006093381A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006093381 A1 20060908; CN 100523920 C 20090805; CN 101069118 A 20071107; EP 1807730 A1 20070718; JP 2008522213 A 20080626; JP 4642858 B2 20110302; KR 100642500 B1 20061106; KR 20060096717 A 20060913
DOCDB simple family (application)
KR 2006000678 W 20060227; CN 200680001286 A 20060227; EP 06716128 A 20060227; JP 2007542932 A 20060227; KR 20050017428 A 20050302