EP 1809568 A2 20070725 - MEMS SWITCHES WITH DEFORMING MEMBRANES
Title (en)
MEMS SWITCHES WITH DEFORMING MEMBRANES
Title (de)
MEMS-SCHALTER MIT VERFORMBARER MEMBRAN
Title (fr)
MICRO-COMMUTATEURS ELECTROMECANIQUES A MEMBRANES DEFORMABLES
Publication
Application
Priority
- US 2005032782 W 20050914
- US 61346504 P 20040927
- US 61350104 P 20040927
- US 14454605 A 20050603
- US 15040705 A 20050610
- US 19892505 A 20050805
Abstract (en)
[origin: WO2006036560A2] MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. In some embodiments, the application of a voltage opens switch contacts.
IPC 8 full level
B81B 3/00 (2006.01); H01H 59/00 (2006.01)
CPC (source: EP)
G09G 3/3466 (2013.01); H01H 59/0009 (2013.01); G02B 26/001 (2013.01); H01H 2001/0084 (2013.01)
Citation (search report)
See references of WO 2006036560A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006036560 A2 20060406; WO 2006036560 A3 20060504; EP 1809568 A2 20070725; JP 2008515150 A 20080508; MX 2007003577 A 20070523; TW 200635845 A 20061016
DOCDB simple family (application)
US 2005032782 W 20050914; EP 05798437 A 20050914; JP 2007533542 A 20050914; MX 2007003577 A 20050914; TW 94133425 A 20050926