EP 1809787 A2 20070725 - PRESSURE CONTROL SYSTEM IN A PHOTOVOLTAIC SUBSTRATE DEPOSITION
Title (en)
PRESSURE CONTROL SYSTEM IN A PHOTOVOLTAIC SUBSTRATE DEPOSITION
Title (de)
DRUCKSTEUERUNGSSYSTEM EINER PHOTOVOLTAISCHEN SUBSTRATABLAGERUNGSVORRICHTUNG
Title (fr)
SYSTEME DE COMMANDE DE PRESSION DANS UN APPAREIL DE DEPOT DE SUBSTRAT PHOTOVOLTAIQUE
Publication
Application
Priority
- US 2005040932 W 20051110
- US 62684304 P 20041110
- US 27253605 P 20051109
IPC 8 full level
C23C 16/00 (2006.01)
CPC (source: EP)
C23C 14/568 (2013.01); C23C 16/545 (2013.01); H01L 31/206 (2013.01); Y02E 10/50 (2013.01); Y02P 70/50 (2015.11)
Citation (search report)
See references of WO 2006053218A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
CA 2586969 A1 20060518; EP 1809787 A2 20070725; JP 2008520107 A 20080612
DOCDB simple family (application)
CA 2586969 A 20051110; EP 05851547 A 20051110; JP 2007541349 A 20051110