EP 1812958 A1 20070801 - SYSTEMS AND METHODS FOR CREATING CRYSTALLOGRAPHIC-ORIENTATION CONTROLLED POLY-SILICON FILMS
Title (en)
SYSTEMS AND METHODS FOR CREATING CRYSTALLOGRAPHIC-ORIENTATION CONTROLLED POLY-SILICON FILMS
Title (de)
SYSTEME UND VERFAHREN ZUR ERZEUGUNG VON BEZÜGLICH KRISTALLOGRAPHISCHER ORIENTIERUNG GESTEUERTEN POLYSILIZIUMFILMEN
Title (fr)
SYSTEMES ET PROCEDES PERMETTANT DE PRODUIRE DES FILMS DE POLYSILICIUM A ORIENTATION CRYSTALLOGRAPHIQUE CONTROLEE
Publication
Application
Priority
US 2004039055 W 20041118
Abstract (en)
[origin: WO2006055003A1] In accordance with one aspect, the present invention provides a method for providing polycrystalline films having a controlled microstructure as well as a crystallographic texture. The methods provide elongated grains or single-crystal islands of a specified crystallographic orientation. In particular, a method of processing a film on a substrate includes generating a textured film having crystal grains oriented predominantly in one preferred crystallographic orientation; and then generating a microstructure using sequential lateral solidification crystallization that provides a location-controlled growth of the grains orientated in the preferred crystallographic orientation.
IPC 8 full level
B23K 26/00 (2006.01); H01L 21/20 (2006.01)
CPC (source: EP KR US)
B23K 26/0622 (2015.10 - EP); B23K 26/066 (2015.10 - EP); C30B 13/24 (2013.01 - EP); H01L 21/02422 (2013.01 - EP); H01L 21/02488 (2013.01 - EP); H01L 21/02532 (2013.01 - EP); H01L 21/02595 (2013.01 - US); H01L 21/02609 (2013.01 - EP US); H01L 21/02672 (2013.01 - EP); H01L 21/02678 (2013.01 - US); H01L 21/0268 (2013.01 - EP); H01L 21/02686 (2013.01 - EP US); H01L 21/02691 (2013.01 - EP); H01L 21/20 (2013.01 - KR)
Citation (search report)
See references of WO 2006055003A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006055003 A1 20060526; EP 1812958 A1 20070801; JP 2008521247 A 20080619; JP 5068171 B2 20121107; KR 101212378 B1 20121213; KR 20070097442 A 20071004
DOCDB simple family (application)
US 2004039055 W 20041118; EP 04811722 A 20041118; JP 2007543001 A 20041118; KR 20077013682 A 20041118