EP 1818112 A3 20070912 - Method for removing a layer
Title (en)
Method for removing a layer
Title (de)
Verfahren zur Entfernung einer Schicht
Title (fr)
Procédé pour éliminer une couche
Publication
Application
Priority
- EP 05700980 A 20050117
- EP 04002158 A 20040130
- EP 07010914 A 20050117
Abstract (en)
[origin: EP1559485A1] The removal zone (10) is specially pretreated, to cause a form of damage there. This accelerates the rate of cleaning, in comparison with a corresponding but untreated region.
IPC 8 full level
B08B 7/00 (2006.01); C23G 1/00 (2006.01); C23G 5/00 (2006.01)
CPC (source: EP US)
B08B 7/00 (2013.01 - EP US); C23G 1/00 (2013.01 - EP US); C23G 5/00 (2013.01 - EP US)
Citation (search report)
- [PX] EP 1411149 A1 20040421 - SIEMENS AG [DE], et al
- [XY] US 2710271 A 19550607 - BUCKE FERNSLER EDWARD, et al
- [XY] US 2120494 A 19380614 - HAUGER FLOYD M
- [YA] US 4098450 A 19780704 - KELLER DONALD L, et al
- [YA] EP 1312437 A1 20030521 - ALSTOM SWITZERLAND LTD [CH]
- [A] EP 1013797 A1 20000628 - GEN ELECTRIC [US]
- [A] US 5575858 A 19961119 - CHEN OTIS Y [SG], et al
- [A] US 4439241 A 19840327 - AULT EARLE A [US], et al
- [A] US 5464479 A 19951107 - KENTON DONALD J [US], et al
- [E] EP 1559485 A1 20050803 - SIEMENS AG [DE]
- [YA] MIGLIETTI W ET AL: "Advantages of fluoride ion cleaning at sub-atmospheric pressure", ENGINEERING FAILURE ANALYSIS, PERGAMON, vol. 5, no. 2, June 1998 (1998-06-01), pages 149 - 169, XP002402336, ISSN: 1350-6307
Designated contracting state (EPC)
CH DE GB IT LI
DOCDB simple family (publication)
EP 1559485 A1 20050803; CN 1929931 A 20070314; DE 502005006806 D1 20090423; EP 1708829 A1 20061011; EP 1708829 B1 20090311; EP 1818112 A2 20070815; EP 1818112 A3 20070912; US 2007170150 A1 20070726; WO 2005072884 A1 20050811
DOCDB simple family (application)
EP 04002158 A 20040130; CN 200580007966 A 20050117; DE 502005006806 T 20050117; EP 05700980 A 20050117; EP 07010914 A 20050117; EP 2005000405 W 20050117; US 58770205 A 20050117