EP 1825236 A1 20070829 - VARIABLE INDUCTOR TYPE MEMS PRESSURE SENSOR USING MAGNETOSTRICTIVE EFFECT
Title (en)
VARIABLE INDUCTOR TYPE MEMS PRESSURE SENSOR USING MAGNETOSTRICTIVE EFFECT
Title (de)
MEMS-DRUCKSENSOR DES VARIABLEN INDUKTIVITÄTSTYPS MIT MAGNETOSTRIKTIVEM EFFEKT
Title (fr)
CAPTEUR DE PRESSION MEMS DE TYPE INDUCTEUR VARIABLE UTILISANT UN EFFET MAGNETOSTRICTIF
Publication
Application
Priority
- KR 2005001281 W 20050503
- KR 20040103010 A 20041208
Abstract (en)
[origin: WO2006062275A1] A variable inductor type MEMS pressure sensor using a magnetostrictive effect comprises an inductor array unit and a capacitor unit. The inductor array unit includes a coil unit having a plurality of serially connected circular electrodes formed on a first substrate and a magnetostrictive material thin film corresponding one by one to the circular electrode formed on a second substrate opposite to the first substrate at a predetermined distance in parallel to form an inductor which has the magnetostrictive material thin film as a core of the coil unit for inducing change of magnetic permeability of the magnetostrictive thin film depending on external pressure to vary inductance of the inductor. The capacitor unit constitutes a LC resonant circuit with the inductor array unit to convert magnetic energy discharged in the inductor array unit into a voltage. The variable inductor type MEMS pressure sensor has an excellent resolution because it is more sensitive than a conventional piezoresistive or capacitance sensor, and is manufactured using a MEMS process technology exchangeable with a semiconductor process, thereby enabling miniaturization and a mass package process to reduce the cost of production.
IPC 8 full level
G01L 1/14 (2006.01); B81B 3/00 (2006.01); G01L 1/12 (2006.01); G01L 5/00 (2006.01); G01L 9/16 (2006.01); H01L 41/08 (2006.01); H01L 41/12 (2006.01); H01L 41/20 (2006.01); H01L 41/22 (2013.01); H01L 41/47 (2013.01)
CPC (source: EP KR)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006062275 A1 20060615; CN 100573070 C 20091223; CN 101160514 A 20080409; EP 1825236 A1 20070829; EP 1825236 A4 20071212; JP 2008523385 A 20080703; JP 4621257 B2 20110126; KR 100600808 B1 20060718; KR 20060064258 A 20060613
DOCDB simple family (application)
KR 2005001281 W 20050503; CN 200580042137 A 20050503; EP 05740754 A 20050503; JP 2007545355 A 20050503; KR 20040103010 A 20041208