EP 1837946 B1 20120711 - Directional coupler
Title (en)
Directional coupler
Title (de)
Richtkoppler
Title (fr)
Coupleur directionnel
Publication
Application
Priority
EP 06006202 A 20060325
Abstract (en)
[origin: EP1837946A1] The coupler (3) has a via circuit (11) with an input connection and an output connection, and two coupling circuits (13, 15) arranged at a distance from the via circuit. The coupling circuits are provided for determining reflected power and forward power of a plasma process excitation arrangement. The coupling circuits comprise a predetermined and adjusted impedance, and load resistors comprise a resistor value that corresponds to the impedance with a specified tolerance.
IPC 8 full level
H01P 5/18 (2006.01)
CPC (source: EP US)
H01P 5/185 (2013.01 - EP US); H01P 5/187 (2013.01 - EP US)
Citation (examination)
- EP 1014472 A1 20000628 - ROHDE & SCHWARZ [DE]
- US 2002113667 A1 20020822 - TAHARA YUKIHIRO [JP], et al
- WO 2006105847 A1 20061012 - KATHREIN WERKE KG [DE], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1837946 A1 20070926; EP 1837946 B1 20120711; US 2008036554 A1 20080214; US 7755451 B2 20100713
DOCDB simple family (application)
EP 06006202 A 20060325; US 68904307 A 20070321