Global Patent Index - EP 1839093 A1

EP 1839093 A1 2007-10-03 - METHOD FOR PRODUCING A COMPONENT COMPRISING NANOMETRIC MULTILAYERS FOR OPTICAL USES AND COMPONENT PRODUCED ACCORDING TO SAID METHOD

Title (en)

METHOD FOR PRODUCING A COMPONENT COMPRISING NANOMETRIC MULTILAYERS FOR OPTICAL USES AND COMPONENT PRODUCED ACCORDING TO SAID METHOD

Title (de)

VERFAHREN ZUR HERSTELLUNG EINES BAUTEILS MIT NANOMETER-MULTISCHICHTEN FÜR OPTISCHE ANWENDUNGEN SOWIE NACH DIESEM VERFAHREN HERGESTELLTES BAUTEIL

Title (fr)

PROCEDE POUR PRODUIRE UN COMPOSANT PRESENTANT DES MULTICOUCHES NANOMETRIQUES QUI EST DESTINE A DES APPLICATIONS OPTIQUES ET COMPOSANT PRODUIT SELON CE PROCEDE

Publication

EP 1839093 A1 (DE)

Application

EP 06705766 A

Priority

  • DE 2006000027 W
  • DE 102005001232 A

Abstract (en)

[origin: WO2006074642A1] The invention relates to a method for producing a component comprising a nanometric multilayer for optical uses, in particular X-ray optics, the component being preferably a single-crystalline silicon, on which the nanometric multilayer is produced by means of individual layers that are applied using a sol-gel coating process. The aim of the invention is to provide a cost-effective method, according to which the nanometric multilayer can be produced from a single material, in particular from aluminium oxide with a predefinable thickness modulation in said multilayer. To achieve this, the multilayer is produced by structuring successive layers of the same material with the smallest possible layer thickness, each individual layer being produced by the immersion of the component for a short time in a sol-gel bath, or by spraying a sol-gel solution on the component, followed by a drying or annealing process at a predefined temperature in an ambient atmosphere.

IPC 8 full level (invention and additional information)

G03F 7/20 (2006.01); C03C 17/25 (2006.01); G02B 5/20 (2006.01)

CPC (invention and additional information)

B82Y 10/00 (2013.01); G02B 5/283 (2013.01); G02B 5/285 (2013.01); G21K 1/062 (2013.01)

Citation (search report)

See references of WO 2006074642A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

EPO simple patent family

WO 2006074642 A1 20060720; CN 100549836 C 20091014; CN 101103313 A 20080109; DE 112006000587 A5 20071227; EP 1839093 A1 20071003; JP 2008526480 A 20080724

INPADOC legal status


2012-01-25 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20110802

2008-04-16 [DAX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT (TO ANY COUNTRY) DELETED

2008-01-02 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20071130

2007-12-05 [RIN1] INVENTOR (CORRECTION)

- Inventor name: GUTMANN, EMANUEL

2007-12-05 [RIN1] INVENTOR (CORRECTION)

- Inventor name: LEVIN, ALEXANDER A.

2007-12-05 [RIN1] INVENTOR (CORRECTION)

- Inventor name: PAUFLER, PETER

2007-12-05 [RIN1] INVENTOR (CORRECTION)

- Inventor name: DIE ANDERE ERFINDER HABEN AUF IHRE NENNUNG VERZICH

2007-10-03 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20070813

2007-10-03 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR