EP 1839093 A1 20071003 - METHOD FOR PRODUCING A COMPONENT COMPRISING NANOMETRIC MULTILAYERS FOR OPTICAL USES AND COMPONENT PRODUCED ACCORDING TO SAID METHOD
Title (en)
METHOD FOR PRODUCING A COMPONENT COMPRISING NANOMETRIC MULTILAYERS FOR OPTICAL USES AND COMPONENT PRODUCED ACCORDING TO SAID METHOD
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES BAUTEILS MIT NANOMETER-MULTISCHICHTEN FÜR OPTISCHE ANWENDUNGEN SOWIE NACH DIESEM VERFAHREN HERGESTELLTES BAUTEIL
Title (fr)
PROCEDE POUR PRODUIRE UN COMPOSANT PRESENTANT DES MULTICOUCHES NANOMETRIQUES QUI EST DESTINE A DES APPLICATIONS OPTIQUES ET COMPOSANT PRODUIT SELON CE PROCEDE
Publication
Application
Priority
- DE 2006000027 W 20060111
- DE 102005001232 A 20050111
Abstract (en)
[origin: WO2006074642A1] The invention relates to a method for producing a component comprising a nanometric multilayer for optical uses, in particular X-ray optics, the component being preferably a single-crystalline silicon, on which the nanometric multilayer is produced by means of individual layers that are applied using a sol-gel coating process. The aim of the invention is to provide a cost-effective method, according to which the nanometric multilayer can be produced from a single material, in particular from aluminium oxide with a predefinable thickness modulation in said multilayer. To achieve this, the multilayer is produced by structuring successive layers of the same material with the smallest possible layer thickness, each individual layer being produced by the immersion of the component for a short time in a sol-gel bath, or by spraying a sol-gel solution on the component, followed by a drying or annealing process at a predefined temperature in an ambient atmosphere.
IPC 8 full level
C03C 17/25 (2006.01); G02B 5/20 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP)
B82Y 10/00 (2013.01); G02B 5/283 (2013.01); G02B 5/285 (2013.01); G21K 1/062 (2013.01)
Citation (search report)
See references of WO 2006074642A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006074642 A1 20060720; CN 100549836 C 20091014; CN 101103313 A 20080109; DE 112006000587 A5 20071227; EP 1839093 A1 20071003; JP 2008526480 A 20080724
DOCDB simple family (application)
DE 2006000027 W 20060111; CN 200680002070 A 20060111; DE 112006000587 T 20060111; EP 06705766 A 20060111; JP 2007549793 A 20060111