EP 1842228 A2 20071010 - SYSTEM AND METHOD FOR CREATING A SURFACE PATTERN
Title (en)
SYSTEM AND METHOD FOR CREATING A SURFACE PATTERN
Title (de)
SYSTEM UND VERFAHREN ZUR ERZEUGUNG EINER OBERFLÄCHENSTRUKTUR
Title (fr)
SYSTEME ET PROCEDE DE CREATION D'UN MOTIF DE SURFACE
Publication
Application
Priority
- US 2006000708 W 20060110
- US 64308405 P 20050110
Abstract (en)
[origin: WO2006076302A2] Some embodiments of the disclosed surface patterning systems and methods utilize a surface patterning tool coupled to a support and adapted to deposit material onto a substrate, a controller, and first, second, and third actuators electrically coupled to and controlled by the controller. In some embodiments, the first, second, and third actuators are operable to move the substrate in X, Y, and Z directions, respectively, with respect to the surface patterning tool, wherein the substrate is movable by the first, second, and third actuators to different positions with respect to the surface patterning tool, and wherein material is transferable from the surface patterning tool to the substrate in each of the different positions to define the desired surface pattern. One or more of the actuators in some of the disclosed embodiments are piezoelectric actuators.
IPC 8 full level
C12M 1/00 (2006.01); G01N 15/06 (2006.01); H01L 21/302 (2006.01)
CPC (source: EP US)
B82Y 10/00 (2013.01 - EP US); B82Y 40/00 (2013.01 - EP US); G03F 7/0002 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006076302 A2 20060720; WO 2006076302 A3 20070111; CA 2593581 A1 20060720; EP 1842228 A2 20071010; EP 1842228 A4 20100310; JP 2008526538 A 20080724; US 2009074966 A1 20090319
DOCDB simple family (application)
US 2006000708 W 20060110; CA 2593581 A 20060110; EP 06717860 A 20060110; JP 2007550542 A 20060110; US 81359206 A 20060110