Global Patent Index - EP 1842228 A2

EP 1842228 A2 2007-10-10 - SYSTEM AND METHOD FOR CREATING A SURFACE PATTERN

Title (en)

SYSTEM AND METHOD FOR CREATING A SURFACE PATTERN

Title (de)

SYSTEM UND VERFAHREN ZUR ERZEUGUNG EINER OBERFLÄCHENSTRUKTUR

Title (fr)

SYSTEME ET PROCEDE DE CREATION D'UN MOTIF DE SURFACE

Publication

EP 1842228 A2 (EN)

Application

EP 06717860 A

Priority

  • US 2006000708 W
  • US 64308405 P

Abstract (en)

[origin: WO2006076302A2] Some embodiments of the disclosed surface patterning systems and methods utilize a surface patterning tool coupled to a support and adapted to deposit material onto a substrate, a controller, and first, second, and third actuators electrically coupled to and controlled by the controller. In some embodiments, the first, second, and third actuators are operable to move the substrate in X, Y, and Z directions, respectively, with respect to the surface patterning tool, wherein the substrate is movable by the first, second, and third actuators to different positions with respect to the surface patterning tool, and wherein material is transferable from the surface patterning tool to the substrate in each of the different positions to define the desired surface pattern. One or more of the actuators in some of the disclosed embodiments are piezoelectric actuators.

IPC 8 full level (invention and additional information)

H01L 21/302 (2006.01); C12M 1/00 (2006.01); G01N 15/06 (2006.01)

CPC (invention and additional information)

G03F 7/0002 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

EPO simple patent family

WO 2006076302 A2 20060720; WO 2006076302 A3 20070111; CA 2593581 A1 20060720; EP 1842228 A2 20071010; EP 1842228 A4 20100310; JP 2008526538 A 20080724; US 2009074966 A1 20090319

INPADOC legal status


2010-11-03 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20100403

2010-03-10 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 20100205

2008-04-16 [DAX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT (TO ANY COUNTRY) DELETED

2007-10-10 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20070730

2007-10-10 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR