EP 1843884 A2 20071017 - CHUCKING SYSTEM FOR NANO-MANUFACTURING
Title (en)
CHUCKING SYSTEM FOR NANO-MANUFACTURING
Title (de)
AUFSPANNSYSTEM FÜR DIE NANOHERSTELLUNG
Title (fr)
SYSTEME DE MANDRIN DESTINE A LA NANO-FABRICATION
Publication
Application
Priority
- US 2006001145 W 20060112
- US 4742805 A 20050131
- US 4749905 A 20050131
- US 10820805 A 20050418
Abstract (en)
[origin: WO2006083518A2] The present invention is directed towards a chucking system, including, inter alia, a body having a surface with a pin extending therefrom having a throughway defined therein, and a land surrounding the protrusions defining a channel between the pin and the land. In a further embodiment, the body comprises a plurality of protrusions.
IPC 8 full level
B28B 11/08 (2006.01); G03F 7/00 (2006.01)
CPC (source: EP KR)
B25B 11/005 (2013.01 - EP KR); B82Y 10/00 (2013.01 - EP KR); B82Y 40/00 (2013.01 - EP KR); G03F 7/0002 (2013.01 - EP KR); G03F 7/70691 (2013.01 - EP KR)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
WO 2006083518 A2 20060810; WO 2006083518 A3 20070329; EP 1843884 A2 20071017; EP 1843884 A4 20081217; KR 101254042 B1 20130412; KR 20070102723 A 20071019; TW 200633114 A 20060916; TW 200633846 A 20061001; TW I277504 B 20070401; TW I291212 B 20071211; WO 2006083519 A2 20060810; WO 2006083519 A3 20090423; WO 2006083520 A2 20060810; WO 2006083520 A3 20090514
DOCDB simple family (application)
US 2006001145 W 20060112; EP 06718240 A 20060112; KR 20077019969 A 20060112; TW 95102091 A 20060119; TW 95102094 A 20060119; US 2006001151 W 20060112; US 2006001160 W 20060112