EP 1843970 A1 20071017 - MICRORESONATOR
Title (en)
MICRORESONATOR
Title (de)
MIKRORESONATOR
Title (fr)
MICRORESONATEUR
Publication
Application
Priority
- FR 2006050078 W 20060131
- FR 0550276 A 20050131
Abstract (en)
[origin: FR2881416A1] The microresonator has a resonant unit (160) made from monocrystalline silicon, and activation electrodes (120, 121) positioned close to the resonant unit. The unit (160) is placed in an opening in a semiconductor layer (110) that covers a substrate (100). The electrodes (120, 121) are formed in the layer and leveled with the opening. The unit (160) is in the shape of mushroom whose leg is fixed on the substrate. An independent claim is also included for a method of fabricating a microresonator.
IPC 8 full level
B81B 3/00 (2006.01); H03H 3/007 (2006.01)
CPC (source: EP US)
H03H 3/0072 (2013.01 - EP US); H03H 9/2405 (2013.01 - EP US); H03H 2009/02496 (2013.01 - EP US)
Citation (search report)
See references of WO 2006079765A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
FR 2881416 A1 20060804; FR 2881416 B1 20070601; EP 1843970 A1 20071017; US 2009152998 A1 20090618; US 2010295416 A1 20101125; US 7858407 B2 20101228; US 8159109 B2 20120417; WO 2006079765 A1 20060803
DOCDB simple family (application)
FR 0550276 A 20050131; EP 06709462 A 20060131; FR 2006050078 W 20060131; US 26647108 A 20081106; US 85012610 A 20100804