EP 1846735 A1 20071024 - METHOD FOR MEASURING VOLUME BY AN OPTICAL SURFACE PROFILOMETER IN A MICROMECHANICAL DEVICE AND A SYSTEM FOR CARRYING OUT SAID MEASUREMENT
Title (en)
METHOD FOR MEASURING VOLUME BY AN OPTICAL SURFACE PROFILOMETER IN A MICROMECHANICAL DEVICE AND A SYSTEM FOR CARRYING OUT SAID MEASUREMENT
Title (de)
VERFAHREN ZUR VOLUMENMESSUNG DURCH EIN OPTISCHES OBERFLÄCHENPROFILOMETER IN EINER MIKROMECHANISCHEN EINRICHTUNG UND SYSTEM ZUM AUSFÜHREN DER MESSUNG
Title (fr)
PROCEDE DE MESURE DE VOLUME PAR PROFILOMETRIE OPTIQUE DE SURFACE DANS UN DISPOSITIF MICROMECANIQUE ET ENSEMBLE DESTINE A UNE TELLE MESURE
Publication
Application
Priority
- FR 2006050045 W 20060124
- FR 0500748 A 20050125
Abstract (en)
[origin: FR2881222A1] The method involves placing a pumping membrane (133) in two positions, and activating an interferometry for directing light beams on a reference side. The membrane is placed in one of the positions by deformation generated in a mechanical manner so that fluid passage in a pumping chamber is absent. Images of the side are obtained in the respective positions. The images are compared for determining variation of volume of the chamber. An independent claim is also included for an assembly for measuring volume by optical profilometry.
IPC 8 full level
G01F 22/00 (2006.01)
CPC (source: EP US)
G01F 22/00 (2013.01 - EP US)
Citation (search report)
See references of WO 2006079739A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2881222 A1 20060728; EP 1846735 A1 20071024; JP 2008528960 A 20080731; US 2009097037 A1 20090416; US 7782467 B2 20100824; WO 2006079739 A1 20060803
DOCDB simple family (application)
FR 0500748 A 20050125; EP 06709429 A 20060124; FR 2006050045 W 20060124; JP 2007551721 A 20060124; US 81466106 A 20060124