EP 1849038 A2 20071031 - MICROSCOPE SYSTEM FOR TESTING SEMICONDUCTORS
Title (en)
MICROSCOPE SYSTEM FOR TESTING SEMICONDUCTORS
Title (de)
MIKROSKOPSYSTEM ZUM PRÜFEN VON HALBLEITERN
Title (fr)
SYSTEME DE MICROSCOPE UTILISE POUR VERIFIER LES SEMI-CONDUCTEURS
Publication
Application
Priority
- US 2006002109 W 20060119
- US 64874705 P 20050131
- US 64895105 P 20050131
- US 64895205 P 20050131
Abstract (en)
[origin: WO2006083581A2] A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.
IPC 8 full level
G03B 17/48 (2006.01)
CPC (source: EP)
G01R 31/2893 (2013.01)
Citation (search report)
See references of WO 2006083581A2
Designated contracting state (EPC)
DE FR GB NL
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
WO 2006083581 A2 20060810; WO 2006083581 A3 20070705; DE 202006020618 U1 20090312; EP 1849038 A2 20071031; JP 2008529304 A 20080731; TW 200703535 A 20070116; TW I304625 B 20081221
DOCDB simple family (application)
US 2006002109 W 20060119; DE 202006020618 U 20060119; EP 06719077 A 20060119; JP 2007553145 A 20060119; TW 95102972 A 20060126