EP 1851356 A1 20071107 - TUBULAR TARGET COMPRISING A CONNECTING LAYER THAT IS SITUATED BETWEEN THE TUBULAR TARGET AND THE TUBULAR SUPPORT
Title (en)
TUBULAR TARGET COMPRISING A CONNECTING LAYER THAT IS SITUATED BETWEEN THE TUBULAR TARGET AND THE TUBULAR SUPPORT
Title (de)
ROHRTARGET MIT ZWISCHEN TARGETROHR UND TRÄGERROHR ANGEORDNETER VERBINDUNGSSCHICHT
Title (fr)
CIBLE TUBULAIRE DOTEE D'UNE COUCHE DE LIAISON SITUEE ENTRE LE TUBE CIBLE ET LE TUBE SUPPORT
Publication
Application
Priority
- EP 2005013084 W 20051207
- DE 102004060423 A 20041214
Abstract (en)
[origin: WO2006063721A1] The invention relates to a tubular target comprising a cylindrical tubular support and at least one tubular target that is located on the outer surface of said support, a connecting layer being situated between the target and the support. The invention is characterised in that the connecting layer is electrically conductive and has a wetting degree of > 90 %.
IPC 8 full level
C23C 14/34 (2006.01); H01J 37/34 (2006.01)
CPC (source: EP KR US)
C22C 21/00 (2013.01 - KR); C23C 14/14 (2013.01 - KR); C23C 14/3414 (2013.01 - EP KR US); H01J 37/3435 (2013.01 - EP KR US)
Citation (search report)
See references of WO 2006063721A1
Designated contracting state (EPC)
BE CZ DE FR LU NL
DOCDB simple family (publication)
WO 2006063721 A1 20060622; CN 101080508 A 20071128; DE 102004060423 A1 20060629; DE 102004060423 B4 20161027; EP 1851356 A1 20071107; JP 2008523251 A 20080703; KR 20070086523 A 20070827; TW 200632121 A 20060916; TW I404813 B 20130811; US 2009250337 A1 20091008
DOCDB simple family (application)
EP 2005013084 W 20051207; CN 200580042924 A 20051207; DE 102004060423 A 20041214; EP 05819256 A 20051207; JP 2007545898 A 20051207; KR 20077014141 A 20070621; TW 94144186 A 20051214; US 72167705 A 20051207