EP 1854104 A1 20071114 - METHOD FOR PRODUCTION OF A THIN-LAYER STRUCTURE
Title (en)
METHOD FOR PRODUCTION OF A THIN-LAYER STRUCTURE
Title (de)
VERFAHREN ZUM HERSTELLEN EINER DÜNNSCHICHT-STRUKTUR
Title (fr)
PROCEDE DE PRODUCTION D'UNE STRUCTURE A COUCHE MINCE
Publication
Application
Priority
- DE 2006000248 W 20060213
- DE 102005010080 A 20050303
Abstract (en)
[origin: WO2006092114A1] A sacrificial layer is applied in a macroporous support structure substrate. The back face of the support structure substrate is then partly removed such as to expose a region of the sacrificial layer on the back face of the support structure substrate. A thin layer is applied to the back face surface of the support structure substrate and the exposed regions of the sacrificial layer and in the pores a material removal is carried out as far as the thin layer such that the pore bases are formed from the thin layer.
IPC 8 full level
CPC (source: EP KR US)
H01J 5/18 (2013.01 - EP US); H01L 21/20 (2013.01 - KR)
Citation (search report)
See references of WO 2006092114A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 2006092114 A1 20060908; CN 101133461 A 20080227; DE 102005010080 A1 20060914; DE 102005010080 B4 20080403; EP 1854104 A1 20071114; JP 2008538810 A 20081106; KR 20070102584 A 20071018; US 2008160787 A1 20080703
DOCDB simple family (application)
DE 2006000248 W 20060213; CN 200680006541 A 20060213; DE 102005010080 A 20050303; EP 06705966 A 20060213; JP 2007557318 A 20060213; KR 20077019913 A 20070831; US 81747406 A 20060213