EP 1854121 B1 20130529 - METHOD AND APPARATUS FOR EUV LIGHT SOURCE TARGET MATERIAL HANDLING
Title (en)
METHOD AND APPARATUS FOR EUV LIGHT SOURCE TARGET MATERIAL HANDLING
Title (de)
VERFAHREN UND VORRICHTUNG ZUR EUV-LICHTQUELLEN-ZIELMATERIAL-HANDHABUNG
Title (fr)
PROCEDE ET APPAREIL DE MANIEMENT DE MATIERE CIBLE POUR SOURCE DE LUMIERE UV EXTREME
Publication
Application
Priority
- US 2006005541 W 20060217
- US 6712405 A 20050225
- US 8847505 A 20050323
Abstract (en)
[origin: WO2006093687A1] An EUV light source plasma source material handling system and method is disclosed which may comprise a droplet generator having droplet generator plasma source material reservoir (212) in fluid communication with a droplet formation capillary and maintained within a selected range of temperatures sufficient to keep the plasma source material in a liquid form; a plasma source material supply system having a supply reservoir (214) in fluid communication with the droplet generator plasma source material reservoir and holding at least a replenishing amount of plasma source material in liquid form for transfer to the droplet generator plasma source material reservoir, while the droplet generator is on line; a transfer mechanism (210) transferring liquid plasma source material from the supply reservoir to the droplet generator plasma source material reservoir, while the droplet generator is on line. The supply reservoir may comprise a solid form of the plasma source material used to periodically form from a portion of the material in solid form the material in liquid form.
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP KR)
H05G 2/00 (2013.01 - KR); H05G 2/003 (2013.01 - EP); H05G 2/005 (2013.01 - EP); H05G 2/006 (2013.01 - EP); H05G 2/008 (2013.01 - EP)
Designated contracting state (EPC)
DE FR NL
DOCDB simple family (publication)
WO 2006093687 A1 20060908; EP 1854121 A1 20071114; EP 1854121 A4 20110706; EP 1854121 B1 20130529; KR 101177707 B1 20120829; KR 20070110891 A 20071120
DOCDB simple family (application)
US 2006005541 W 20060217; EP 06720828 A 20060217; KR 20077021873 A 20060217