EP 1862790 A1 20071205 - DEFECTIVE PARTICLE MEASURING APPARATUS AND DEFECTIVE PARTICLE MEASURING METHOD
Title (en)
DEFECTIVE PARTICLE MEASURING APPARATUS AND DEFECTIVE PARTICLE MEASURING METHOD
Title (de)
VORRICHTUNG UND VERFAHREN ZUR MESSUNG DEFEKTER PARTIKEL
Title (fr)
DISPOSITIF ET PROCEDE DE MESURE DE PARTICULES DEFECTUEUSES
Publication
Application
Priority
- JP 2006301882 W 20060203
- JP 2005027941 A 20050203
Abstract (en)
A defective particle measuring apparatus that irradiates focused laser light on a sample 14, images scattered light from the sample 14, and measures defective particles in the sample 14 based on the image result, includes a position deviation computing portion 31 which, based on an in-plane intensity distribution of scattered light of each defective particle that is imaged, obtains a deviation from a focal point position on an image point side of the scattered light of each defective particle and calculates a position deviation amount in a depth direction of the defective particle corresponding to the deviation from the focal point position, a light intensity correcting portion 32 for correcting the light intensity of the scattered light of the defective particle corresponding to the position deviation amount in the depth direction, and a size determining portion 33 for determining the defective particle size based on the light intensity corrected by the light intensity correcting portion 32. Thus, the size of the defective particles can be determined at a high precision by a simple constitution in a short time, and density distribution of the defective particles can be obtained.
IPC 8 full level
G01N 15/02 (2006.01); G01B 11/02 (2006.01); G01N 21/47 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP KR US)
G01B 11/02 (2013.01 - KR); G01B 11/0608 (2013.01 - EP US); G01N 15/1433 (2024.01 - EP US); G01N 21/47 (2013.01 - KR); H01L 22/00 (2013.01 - KR); H01L 22/10 (2013.01 - EP US); G01N 21/8806 (2013.01 - EP US); G01N 2015/1452 (2013.01 - EP US)
Citation (search report)
See references of WO 2006082932A1
Designated contracting state (EPC)
DE FR
DOCDB simple family (publication)
EP 1862790 A1 20071205; JP 2006214867 A 20060817; JP 4313322 B2 20090812; KR 100926019 B1 20091111; KR 20070091236 A 20070907; US 2008111992 A1 20080515; US 7633617 B2 20091215; WO 2006082932 A1 20060810
DOCDB simple family (application)
EP 06713025 A 20060203; JP 2005027941 A 20050203; JP 2006301882 W 20060203; KR 20077018949 A 20060203; US 88351006 A 20060203