EP 1869227 A1 20071226 - FEEDING PARTICULATE MATERIAL TO A HEATED SURFACE
Title (en)
FEEDING PARTICULATE MATERIAL TO A HEATED SURFACE
Title (de)
ZUFUHR VON TEILCHENFÖRMIGEM MATERIAL ZU EINER ERHITZTEN OBERFLÄCHE
Title (fr)
TRANSFERT DE MATERIAU PARTICULAIRE SUR UNE SURFACE CHAUFFEE
Publication
Application
Priority
- US 2006003042 W 20060130
- US 5093405 A 20050204
- US 15306605 A 20050615
Abstract (en)
[origin: WO2006083735A1] A method for the vaporization of particulate material (10) includes providing one or more containers (15) each containing possibly distinct particulate materials (10) each having at least one component, fluidizing the particulate material (10) in at least one of the containers (15), and providing a vaporization zone (50) that is thermally isolated from at least one of the containers (15). The method further includes delivering particulate material received from each container (15) to the vaporization zone (50), and applying heat to vaporize the delivered particulate materials (10) at the vaporization zone (50).
IPC 8 full level
C23C 14/24 (2006.01); H01L 51/00 (2006.01)
CPC (source: EP KR US)
C23C 14/00 (2013.01 - KR); C23C 14/12 (2013.01 - EP US); C23C 14/24 (2013.01 - EP KR US); C23C 14/246 (2013.01 - EP US); H10K 71/164 (2023.02 - EP US); H10K 71/00 (2023.02 - US)
Citation (search report)
See references of WO 2006083735A1
Designated contracting state (EPC)
DE GB NL
DOCDB simple family (publication)
WO 2006083735 A1 20060810; EP 1869227 A1 20071226; JP 2008530734 A 20080807; KR 20070099636 A 20071009; US 2006177578 A1 20060810; US 7398605 B2 20080715
DOCDB simple family (application)
US 2006003042 W 20060130; EP 06719755 A 20060130; JP 2007554148 A 20060130; KR 20077017839 A 20070802; US 15306605 A 20050615