EP 1875295 A1 20080109 - MEMS DEVICE WITH MUTUALLY PERPENDICULAR DEFLECTABLE REFLECTIVE AND ELECTRODE SURFACES
Title (en)
MEMS DEVICE WITH MUTUALLY PERPENDICULAR DEFLECTABLE REFLECTIVE AND ELECTRODE SURFACES
Title (de)
MEMS-BAUELEMENT MIT UNTEREINANDER SENKRECHTEN ABLENKBAREN REFLEKTIERENDEN UND ELEKTRODENOBERFLÄCHEN
Title (fr)
DISPOSITIF MEMS COMPRENANT UNE SURFACE REFLECHISSANTE ET UNE SURFACE D'ELECTRODE ORIENTABLES PERPENDICULAIRES L'UNE A L'AUTRE
Publication
Application
Priority
- EP 2005010500 W 20050928
- US 67510605 P 20050427
Abstract (en)
[origin: WO2006114127A1] The present invention relates to a MEMS device including at least one pixel element (132); said pixel element (132) including, a support structure (134), at least one deflectable reflective surface (135) supported by said support structure (134), at least one deflectable electrode surface (146, 148), which electrode surface (146, 148) is essentially perpendicular to said deflectable reflective surface (135), said electrode surface (146, 148) is electrostatically attractable by a standing bar (160, 170) arranged in between pixel elements (132), wherein said standing bar is attracting a greater portion of said electrode surface (146, 148) on a first side of the tilting axis of said pixel element (132) compared to a second side of the tilting axis of said pixel element (132).The invention also relates to a method for operating a MEMS device.
IPC 8 full level
G02B 26/08 (2006.01)
CPC (source: EP)
G02B 26/0841 (2013.01)
Citation (search report)
See references of WO 2006114127A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006114127 A1 20061102; EP 1875295 A1 20080109; JP 2008539455 A 20081113
DOCDB simple family (application)
EP 2005010500 W 20050928; EP 05792349 A 20050928; JP 2008508086 A 20050928