EP 1887912 A4 20101110 - SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS A LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE
Title (en)
SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS A LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE
Title (de)
SYSTEME UND VERFAHREN ZUR IMPLEMENTIERUNG EINES ZUSAMMENWIRKENS ZWISCHEN EINEN ALS LINIENSTRAHL GEFORMTEN LASER UND EINEN AUF EINEM TRÄGER NIEDERGESCHLAGENEN FILM
Title (fr)
SYSTEMES ET PROCEDES DE MISE EN OEUVRE D'UNE INTERACTION ENTRE UN LASER FORME EN UN FAISCEAU LINEAIRE ET UN FILM DEPOSE SUR UN SUBSTRAT
Publication
Application
Priority
- US 2006020223 W 20060525
- US 13810005 A 20050526
Abstract (en)
[origin: WO2006127891A2] A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.
IPC 8 full level
H01L 29/04 (2006.01); H01S 3/08 (2006.01)
CPC (source: EP)
B23K 26/04 (2013.01); B23K 26/0622 (2015.10); B23K 26/0738 (2013.01)
Citation (search report)
- [XA] US 5376770 A 19941227 - KUHL MICHAEL [DE], et al
- [XA] JP H01205891 A 19890818 - TOSHIBA CORP
- [A] US 2002030041 A1 20020314 - VIRTANEN MIKKA [FI], et al
- [A] US 2002031157 A1 20020314 - HEIST PETER [DE], et al
- See references of WO 2006127891A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006127891 A2 20061130; WO 2006127891 A3 20090416; EP 1887912 A2 20080220; EP 1887912 A4 20101110
DOCDB simple family (application)
US 2006020223 W 20060525; EP 06760377 A 20060525