EP 1889287 A1 20080220 - ULTRAVIOLET CURING PROCESS FOR SPIN-ON DIELECTRIC MATERIALS USED IN PRE-METAL AND/OR SHALLOW TRENCH ISOLATION APPLICATIONS
Title (en)
ULTRAVIOLET CURING PROCESS FOR SPIN-ON DIELECTRIC MATERIALS USED IN PRE-METAL AND/OR SHALLOW TRENCH ISOLATION APPLICATIONS
Title (de)
UNLTRAVIOLET-AUSHÄRTPROZESS FÜR IN VORMETALL- UND/ODER SEICHTGRABEN-ISOLATIONSANWENDUNGEN VERWENDETE DIELEKTRISCHE AUFSCHLEUDERMATERIALIEN
Title (fr)
PROCEDE DE TRAITEMENT ULTRAVIOLET POUR DES MATERIAUX DIELECTRIQUES APPLIQUES PAR CENTRIFUGATION UTILISES DANS DES APPLICATIONS D'ISOLATION PREMETALLIQUES ET/OU DE TRANCHEES PEU PROFONDES
Publication
Application
Priority
US 2005020861 W 20050609
Abstract (en)
[origin: WO2007027165A1] A UV curing process for a dielectric material used in pre-metal and shallow trench isolation applications comprises coating a suitable dielectric material onto a substrate; and exposing the dielectric material to ultraviolet radiation in an amount effective to reduce an organic content and/or increase a density and/or increase a wet etch resistance of the dielectric material. Optionally, the UV cured dielectric material may be exposed to multiple ultraviolet radiation patterns.
IPC 8 full level
H01L 21/3105 (2006.01); H01L 21/312 (2006.01)
CPC (source: EP US)
G03F 7/0757 (2013.01 - EP); H01L 21/02348 (2013.01 - US); H01L 21/31058 (2013.01 - EP); H01L 21/02118 (2013.01 - EP US); H01L 21/02126 (2013.01 - EP US); H01L 21/02134 (2013.01 - EP US); H01L 21/02137 (2013.01 - EP US); H01L 21/02203 (2013.01 - EP US); H01L 21/02216 (2013.01 - EP); H01L 21/02282 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 2007027165 A1 20070308; CN 101194344 A 20080604; EP 1889287 A1 20080220; JP 2008544484 A 20081204
DOCDB simple family (application)
US 2005020861 W 20050609; CN 200580050060 A 20050609; EP 05769209 A 20050609; JP 2008515678 A 20050609