EP 1894896 B1 20100331 - Mixed powder and a method for producing quartz glass using the powder
Title (en)
Mixed powder and a method for producing quartz glass using the powder
Title (de)
Gemischtes Pulver und Verfahren zur Herstellung von Quarzglas unter Einsatz des Pulvers
Title (fr)
Mélange de poudres et procédé pour la fabrication de verre en quartz utilisant ce mélange
Publication
Application
Priority
JP 2006236178 A 20060831
Abstract (en)
[origin: EP1894896A1] In order to provide quartz glass which has excellent plasma corrosion resistance and can be used for semiconductor production, it is suggested to use a mixed quartz powder which is suitable for the production of the quartz glass. Furthermore, a production process for quartz glass using the quartz powder is provided. The mixed quartz glass powder containing from 0.1 to 20 mass % in total of two or more of dope elements, in which the dope element contains one or more of first elements selected from the group consisting of N, C and F and one or more of second elements selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids.
IPC 8 full level
C03B 19/01 (2006.01); C03B 19/09 (2006.01); C03C 3/06 (2006.01); C03C 3/112 (2006.01); C03C 4/20 (2006.01); C03C 6/04 (2006.01); C03C 6/06 (2006.01)
CPC (source: EP US)
C03B 19/063 (2013.01 - EP US); C03B 32/005 (2013.01 - EP US); C03C 1/00 (2013.01 - EP US); C03C 3/06 (2013.01 - EP US); C03C 3/112 (2013.01 - EP US); C03C 4/20 (2013.01 - EP US); C03B 2201/12 (2013.01 - EP US); C03B 2201/20 (2013.01 - EP US); C03B 2201/24 (2013.01 - EP US); C03B 2201/36 (2013.01 - EP US); C03C 2201/12 (2013.01 - EP US); C03C 2201/23 (2013.01 - EP US); C03C 2201/24 (2013.01 - EP US); C03C 2201/26 (2013.01 - EP US); C03C 2201/32 (2013.01 - EP US); C03C 2201/3411 (2013.01 - EP US); C03C 2201/3435 (2013.01 - EP US); C03C 2201/36 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IE IT NL
DOCDB simple family (publication)
EP 1894896 A1 20080305; EP 1894896 B1 20100331; DE 602007005556 D1 20100512; JP 2008056533 A 20080313; US 2008053151 A1 20080306; US 2011120190 A1 20110526; US 7905932 B2 20110315; US 8156761 B2 20120417
DOCDB simple family (application)
EP 07114836 A 20070823; DE 602007005556 T 20070823; JP 2006236178 A 20060831; US 201113023262 A 20110208; US 89740607 A 20070830