EP 1895270 B1 20110601 - Microsystem, in particular a microgyrometer, with a detection element having capacitive electrodes
Title (en)
Microsystem, in particular a microgyrometer, with a detection element having capacitive electrodes
Title (de)
Mikrosystem, insbesondere Mikro-Gyroskop, mit Detektionselement mit kapazitiven Elektroden
Title (fr)
Microsystème, plus particulièrement microgyromètre, avec élément de détection à électrodes capacitives
Publication
Application
Priority
FR 0607692 A 20060901
Abstract (en)
[origin: EP1895270A2] The microsystem has oscillating mass detection unit with mobile detection elements having a set of mobile electrodes (10a) and sets of stationary electrodes (11, 12), integrated to a substrate. Fixed electrodes of each set are interconnected with each other by using interconnection bars (13, 14) that are made of an electrically conductive material or high temperature resistant material. Bars extend above the electrodes (11, 12), in a plane that is parallel to substrate. The bars are fixed to the electrodes (11, 12) by studs (15, 16).
IPC 8 full level
G01C 19/02 (2006.01); G01C 19/56 (2012.01)
CPC (source: EP US)
G01C 19/5747 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1895270 A2 20080305; EP 1895270 A3 20091014; EP 1895270 B1 20110601; AT E511629 T1 20110615; FR 2905457 A1 20080307; FR 2905457 B1 20081017; JP 2008089581 A 20080417; JP 5335212 B2 20131106; US 2008053226 A1 20080306; US 7631558 B2 20091215
DOCDB simple family (application)
EP 07354045 A 20070807; AT 07354045 T 20070807; FR 0607692 A 20060901; JP 2007227948 A 20070903; US 88918207 A 20070809