Global Patent Index - EP 1897132 A1

EP 1897132 A1 20080312 - METHOD FOR FABRICATING SHALLOW TRENCHES

Title (en)

METHOD FOR FABRICATING SHALLOW TRENCHES

Title (de)

VERFAHREN ZUM HERSTELLEN VON SEICHTEN GRÄBEN

Title (fr)

PROCEDE DE FABRICATION DE TRANCHEES PEU PROFONDES

Publication

EP 1897132 A1 20080312 (EN)

Application

EP 05789067 A 20050628

Priority

  • US 2005022673 W 20050628
  • US 16924305 A 20050627

IPC 8 full level

H01L 21/76 (2006.01); H01L 21/762 (2006.01)

CPC (source: EP)

H01L 21/76227 (2013.01); H01L 21/76245 (2013.01); H01L 21/76237 (2013.01)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

EP 1897132 A1 20080312; EP 1897132 A4 20141126; JP 2009508323 A 20090226

DOCDB simple family (application)

EP 05789067 A 20050628; JP 2008518107 A 20050628