EP 1897132 A4 20141126 - METHOD FOR FABRICATING SHALLOW TRENCHES
Title (en)
METHOD FOR FABRICATING SHALLOW TRENCHES
Title (de)
VERFAHREN ZUM HERSTELLEN VON SEICHTEN GRÄBEN
Title (fr)
PROCEDE DE FABRICATION DE TRANCHEES PEU PROFONDES
Publication
Application
Priority
- US 2005022673 W 20050628
- US 16924305 A 20050627
IPC 8 full level
H01L 21/76 (2006.01); H01L 21/762 (2006.01)
CPC (source: EP)
H01L 21/76227 (2013.01); H01L 21/76245 (2013.01); H01L 21/76237 (2013.01)
Citation (search report)
- [XI] JP S61180449 A 19860813 - TOKO INC
- [XI] WO 0245146 A1 20020606 - TELEPHUS INC [KR], et al
- [A] US 6437417 B1 20020820 - GILTON TERRY L [US]
- See references of WO 2007001297A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1897132 A1 20080312; EP 1897132 A4 20141126; JP 2009508323 A 20090226
DOCDB simple family (application)
EP 05789067 A 20050628; JP 2008518107 A 20050628