EP 1899277 A1 20080319 - MEDIUM FOR ETCHING OXIDIC TRANSPARENT CONDUCTIVE LAYERS
Title (en)
MEDIUM FOR ETCHING OXIDIC TRANSPARENT CONDUCTIVE LAYERS
Title (de)
MEDIUM ZUR ÄTZUNG VON OXIDISCHEN TRANSPARENT LEITFÄHIGEN SCHICHTEN
Title (fr)
AGENT DE GRAVURE DE COUCHES CONDUCTRICES TRANSPARENTES OXYDANTES
Publication
Application
Priority
- EP 2006005460 W 20060608
- DE 102005031469 A 20050704
Abstract (en)
[origin: WO2007003255A1] The invention relates to a novel dispersible medium for etching doped tin oxide layers with a non-Newtonian flow behavior in order to etch surfaces during the production of displays and/or solar cells. Also disclosed is the use of said medium. The inventive medium is provided particularly in the form of particle-free compositions, by means of which selective fine structures can be etched without damaging or attacking adjacent surfaces.
IPC 8 full level
C03C 15/00 (2006.01)
CPC (source: EP KR US)
C03C 15/00 (2013.01 - EP KR US); C09K 13/04 (2013.01 - EP US); C09K 13/06 (2013.01 - EP US); H01L 31/1884 (2013.01 - EP US); Y02E 10/50 (2013.01 - EP US)
Citation (search report)
See references of WO 2007003255A1
Citation (examination)
DE 4104713 A1 19910829 - CANON KK [JP]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102005031469 A1 20070111; CN 101208277 A 20080625; CN 101208277 B 20140924; EP 1899277 A1 20080319; HK 1119652 A1 20090313; JP 2008547232 A 20081225; JP 5373394 B2 20131218; KR 20080025757 A 20080321; MY 157618 A 20160630; TW 200710206 A 20070316; TW I391474 B 20130401; US 2008210660 A1 20080904; WO 2007003255 A1 20070111; WO 2007003255 A8 20070322
DOCDB simple family (application)
DE 102005031469 A 20050704; CN 200680023243 A 20060608; EP 06754211 A 20060608; EP 2006005460 W 20060608; HK 08111757 A 20081024; JP 2008518655 A 20060608; KR 20087003019 A 20080204; MY PI20063097 A 20060629; TW 95124352 A 20060704; US 99460806 A 20060608