EP 1899499 B1 20101110 - METHOD FOR PRODUCING A LAYER, WHICH HAS NANOPARTICLES, ON A SUBSTRATE
Title (en)
METHOD FOR PRODUCING A LAYER, WHICH HAS NANOPARTICLES, ON A SUBSTRATE
Title (de)
VERFAHREN ZUM HERSTELLEN EINER NANOPARTIKEL AUFWEISENDEN SCHICHT AUF EINEM SUBSTRAT
Title (fr)
PROCEDE POUR PRODUIRE SUR UN SUBSTRAT UNE COUCHE PRESENTANT DES NANOPARTICULES
Publication
Application
Priority
- EP 2006063778 W 20060703
- DE 102005032711 A 20050707
Abstract (en)
[origin: US2009047444A1] The invention relates to a method for producing a layer (110) having nanoparticles (40), on a substrate (100). The invention is based on the object of specifying a method for producing a layer containing nanoparticles, which method can be carried out particularly easily and nevertheless offers a very wide degree of freedom for the configuration and the composition of the layer to be produced. According to the invention, this object is achieved in that nanoparticles (40) are released and a nanoparticle stream (50) is produced in a first process chamber (10), the nanoparticle stream (50) is passed into a second process chamber (80), and the nanoparticles (40) are deposited on the substrate (100) in the second process chamber (80).
IPC 8 full level
C23C 24/04 (2006.01); C23C 24/00 (2006.01)
CPC (source: EP US)
C23C 24/00 (2013.01 - EP US); C23C 26/00 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2009047444 A1 20090219; US 7906171 B2 20110315; AT E487809 T1 20101115; CN 101218373 A 20080709; DE 102005032711 A1 20070111; DE 502006008288 D1 20101223; DK 1899499 T3 20110214; EP 1899499 A1 20080319; EP 1899499 B1 20101110; ES 2355429 T3 20110325; JP 2009500522 A 20090108; WO 2007006674 A1 20070118
DOCDB simple family (application)
US 99484506 A 20060703; AT 06777538 T 20060703; CN 200680024592 A 20060703; DE 102005032711 A 20050707; DE 502006008288 T 20060703; DK 06777538 T 20060703; EP 06777538 A 20060703; EP 2006063778 W 20060703; ES 06777538 T 20060703; JP 2008519922 A 20060703