EP 1902457 A1 20080326 - NOZZLE ASSEMBLY
Title (en)
NOZZLE ASSEMBLY
Title (de)
DÜSENANORDNUNG
Title (fr)
SYSTEME DE BUSES
Publication
Application
Priority
- EP 2006006677 W 20060707
- DE 102005032983 A 20050714
Abstract (en)
[origin: WO2007006509A1] The invention relates to a nozzle assembly (1) for dispensing a fluid, especially for injecting the fluid into a vacuum chamber. Said nozzle assembly (1) comprises a nozzle body (2) with a continuous nozzle duct (9) and a nozzle port (10) that is embodied at the discharge end and is used for discharging the fluid, and a feeding capillary tube (8) which extends coaxially in relation to the nozzle duct (9) and is used for delivering the fluid to be injected. The feeding capillary tube (8) extends into the nozzle duct (9) of the nozzle body (2) in the direction of flow in order to reduce the dead volume.
IPC 8 full level
H01J 49/04 (2006.01); B05B 1/02 (2006.01)
CPC (source: EP US)
B05B 1/02 (2013.01 - EP US); H01J 49/0431 (2013.01 - EP US)
Citation (search report)
See references of WO 2007006509A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2007006509 A1 20070118; DE 102005032983 A1 20070125; DE 102005032983 B4 20070531; EP 1902457 A1 20080326; US 2008308644 A1 20081218
DOCDB simple family (application)
EP 2006006677 W 20060707; DE 102005032983 A 20050714; EP 06776162 A 20060707; US 99553206 A 20060707