EP 1905057 A4 20120627 - ARRAYS OF MICROCAVITY PLASMA DEVICES WITH DIELECTRIC ENCAPSULATED ELECTRODES
Title (en)
ARRAYS OF MICROCAVITY PLASMA DEVICES WITH DIELECTRIC ENCAPSULATED ELECTRODES
Title (de)
ARRAYS VON MIKROKAVITÄTS-PLASMAGERÄTEN MIT GEKAPSELTEN DIELEKTRISCHEN ELEKTRODEN
Title (fr)
RESEAUX DE DISPOSITIFS A PLASMA A MICROCAVITES COMPRENANT DES ELECTRODES ENCAPSULEES DANS UN DIELECTRIQUE
Publication
Application
Priority
- US 2006027667 W 20060717
- US 69947505 P 20050715
Abstract (en)
[origin: WO2007011865A2] The invention concerns microcavity plasma devices and arrays with thin foil metal electrodes (16, 18) protected by metal oxide dielectric (15, 19). Devices of the invention are amenable to mass production techniques, and may, for example, be fabricated by roll to roll processing. Exemplary devices of the invention are flexible. Embodiments of the invention provide for large arrays of microcavity plasma devices that can be made inexpensively. The structure of preferred embodiment microcavity plasma devices of the invention is based upon thin foils of metal that are available or can be produced in arbitrary lengths, such as on rolls. In a device of the invention, a pattern of microcavities (12) is produced in a metal foil. Oxide is subsequently grown on the foil and within the microcavities (where plasma is to be produced) to protect the microcavity and electrically isolate the foil. A second metal foil is also encapsulated with oxide and is bonded to the first encapsulated foil. For preferred embodiment microcavity plasma device arrays of the invention, no particular alignment is necessary during bonding of the two encapsulated foils. A thin glass layer (25) or vacuum packaging (34), for example, is able to seal the discharge medium into the array.
IPC 8 full level
H01J 17/49 (2012.01); H01J 65/04 (2006.01); H05H 1/24 (2006.01)
CPC (source: EP KR)
H01J 11/18 (2013.01 - EP); H01J 11/20 (2013.01 - KR); H01J 61/04 (2013.01 - KR); H01J 65/046 (2013.01 - EP); H05H 1/2437 (2021.05 - EP)
Citation (search report)
- [E] WO 2007011388 A2 20070125 - UNIV ILLINOIS [US], et al
- [A] US 2004160162 A1 20040819 - EDEN J GARY [US], et al
- [A] WO 2004032176 A1 20040415 - LEE KYU-WANG [KR], et al
- [A] US 2002030437 A1 20020314 - SHIMIZU NOBUHIRO [JP], et al
- [A] EDEN J G ET AL: "Microdischarge Devices With a Nanoporous Al<tex>$_2$</tex>O<tex>$_3$< /tex>Dielectric: Operation in Ne and Air", IEEE TRANSACTIONS ON PLASMA SCIENCE, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 33, no. 2, 1 April 2005 (2005-04-01), pages 572 - 573, XP011130303, ISSN: 0093-3813, DOI: 10.1109/TPS.2005.845268
- See references of WO 2007011865A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2007011865 A2 20070125; WO 2007011865 A3 20090402; EP 1905057 A2 20080402; EP 1905057 A4 20120627; EP 1905057 B1 20160309; JP 2009502010 A 20090122; JP 5271080 B2 20130821; KR 20080031957 A 20080411
DOCDB simple family (application)
US 2006027667 W 20060717; EP 06787559 A 20060717; JP 2008521697 A 20060717; KR 20087003573 A 20080214